The electronic structure of doped Mn in (Ga,Mn)As is studied by resonant inelastic X-ray scattering (RIXS). From configuration-interaction cluster-model calculations, the line shapes of the Mn L3 RIXS spectra can be explained by d-d excitations from the Mn 3+ ground state, dominated by charge-transferred states, rather than a Mn 2+ ground state. Unlike archetypical d-d excitation, the peak widths are broader than the experimental energy resolution. We attribute the broadening to a finite lifetime of the d-d excitations, which decay rapidly to electron-hole pairs in the host valence and conduction bands through hybridization of the Mn 3d orbital with the ligand band.PACS numbers: 75.50. Pp, 78.70.Ck, 78.70.En A diluted magnetic semiconductor (DMS), in which a host semiconductor is doped with a low concentrations of magnetic ions, is a material of interest for spintronics research. In particular, ferromagnetic DMSs have attracted considerable attention because the itinerant carriers are considered to mediate the magnetic interaction between doped ions [1,2]. This type of magnetism is called "carrier-induced ferromagnetism" and enables the possibility of manipulating both electronic charge and spin degrees of freedom. III-V based DMS Ga 1−x Mn x As is an archetypical ferromagnetic DMS and has been studied from both fundamentally and in applications as a ferromagnetic DMS [3]. Spintronic devices using Ga 1−x Mn x As have been fabricated and their effectiveness has been demonstrated [4,5], although the Curie temperature (T C ) of Ga 1−x Mn x As is below room temperature (T C < 200 K).Understanding the mechanism of ferromagnetism in Ga 1−x Mn x As is strongly desirable to develop DMS for application in spintronic devices. Several physical models of the ferromagnetism have been proposed, e.g., the Zener p-d exchange model [1,6,7], the Mn 3d impurity band model [8][9][10], and the magnetic polaron model [11,12]. These models depend on the localization of hole carriers around the Mn ions, the energy position of the Mn 3d states, and the strength of hybridization between the Mn 3d orbital and the ligand band. To obtain a fundamental understanding of ferromagnetism, it is essential to know the Mn 3d electronic configurations in the ground state. If the valence state of Mn in the ground state is divalent (Mn 2+ ), the Mn ion acts as an acceptor supplying a hole to the host GaAs, supporting the Zener p-d exchange model. Thus, the electronic structure of Mn 3d ions in Ga 1−x Mn x As has been intensively investigated experimentally [10,[13][14][15]. However, the presence of divalent (Mn 2+ ) or trivalent (Mn 3+ ) states has not been conclusively determined, and the degree of the localization of the Mn 3d states remains a matter of dispute.In this Letter, to address the electronic structure of the doped Mn ions, we report the results of Mn L 3 Xray absorption spectroscopy (XAS) and resonant inelastic X-ray scattering (RIXS) measurements of Ga 1−x Mn x As (x = 0.04). RIXS is a powerful tool to investigate electronic excitatio...