Vacuum UV fluorescence excitation spectroscopy of BCl3. Electronic spectroscopy of BCl2, BCl2 + and BCl3 +

Biehl, H.; Creasey, Jeremy C.; Smith, David M.; Tuckett, Richard P.; Yoxall, K.R.; Baumgärtel, H.; Jochims, H.‐W.; Rockland, U.

doi:10.1039/ft9959103073

Cited by 25 publications

(48 citation statements)

References 18 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The lithium fluoride window was used to confirm that contributions from other band systems produced as a result of excitation by second order vacuum ultraviolet radiation were negligible. Similar emission systems have been observed also in the dispersed emission spectra recorded following excitation of BF 3 and BC13 [1,3]. The spectra were assigned to linear-bent transitions between excited valence states and the ground state of the BF 2 and BC12 radicals.…”

Section: Non-dispersed Fluorescence and Dispersed Emission Spectroscomentioning

confidence: 85%

“…The close similarity between the photoabsorption and fluorescence excitation spectra suggests that dissociation to form excited emitting states of the BBr~ radical is a major decay pathway for these BBr 3 Rydberg states. The spectra are considerably more complicated than the equivalent fluorescence excitation spectra of either BF 3 or BCI a [1][2][3]. Planckaert et al attribute much of the additional structure to transitions to triplet Rydberg states which become weakly allowed because of the relatively large spin-orbit coupling interaction due to the bromine atoms.…”

Section: Non-dispersed Fluorescence and Dispersed Emission Spectroscomentioning

confidence: 97%

“…The experiments described form part of a series of studies of the fluorescence excitation spectroscopy of the group III halides [1][2][3]. The boron trihalides, BF3, BCI~ and BBr3, are widely used in the radiofrequency plasma etching of semiconductor devices [4].…”

Section: Introductionmentioning

confidence: 99%

“…The vacuum ultraviolet spectroscopy of the boron trihalides has been investigated by several groups using a number of different experimental techniques [1][2][3][5][6][7]. X*A~ 0"00 Calculated using 0 K heats of formation [22].…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Vacuum ultraviolet fluorescence excitation spectroscopy of BBr₃in the range 8–20 eV

et al. 1996

View full text Add to dashboard Cite

The vacuum ultraviolet and visible spectroscopy of BBr a using fluorescence excitation and dispersed emission techniques is reported. Spectra have been recorded following excitation using synchrotron radiation in the energy range 8-20 eV. Rydberg transitions of BBr 3 have been observed and assigned.Analysis of the Rydberg spectra shows that the relative order of the three highest occupied valence molecular orbitals of BBr 3 is 3e j < le H < la~. The Rydberg states have been shown to fragment to form fluorescing states of BBr and BBr 2. The dispersed emission spectrum of the BBr 2 radical has been identified. Fluorescence was observed between 240 nm and 390 nm and the emission has been attributed to at least two distinct BBr 2 electronic transitions. Lifetimes of 18 _+ 2 ns and 24 _+ 2 ns have been measured for the emitting states. Emission from the I)~E ' state to the X2A~ state of BBr~ has also been observed between 350 nm and 440 nm. The threshold for the production of fluorescence from I)2E ' BBr~ has been determined to be 13.93__0'02eV. High lying vibrational levels of I)~E ' BBr~ produced at excitation energies greater than 15-8_+ 0.2 eV may also dissociate to form fluorescing states of BBr~. Emission from these fragments has been observed between 250 nm and 300 nm. At higher excitation energies the BBr a molecule has been shown to dissociate to produce isolated boron and bromine atoms. Thresholds for fragmentation to form excited 2S and 2D states of boron have been determined to be 16"3 _+ 0'2 eV and 17-4_+ 0'2 eV, respectively.

show abstract

Section: Non-dispersed Fluorescence and Dispersed Emission Spectroscomentioning

confidence: 85%

Section: Non-dispersed Fluorescence and Dispersed Emission Spectroscomentioning

confidence: 97%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Vacuum ultraviolet fluorescence excitation spectroscopy of BBr₃in the range 8–20 eV

et al. 1996

View full text Add to dashboard Cite

show abstract

“…The apparatus used to perform these experiments is similar in concept to that described elsewhere [2,7]. open-electrode CCD collects the dispersed signal, which uses liquid nitrogen cooling to reduce the dark count level to < 1 count pixel -1 hour -1 .…”

Section: Apparatus For Dispersed Fluorescence Experiments In the Gas mentioning

confidence: 99%

Characterisation of a new VUV beamline at the Daresbury SRS using a dispersed fluorescence apparatus incorporating CCD detection

Howle

Ali

Tuckett

et al. 2005

Nuclear Instruments and Methods in Physics Research Section B:

Self Cite

View full text Add to dashboard Cite

Electron Interactions with Cl2, CCl2F2, BCl3, and SF6

Christophorou

Olthoff

2004

Fundamental Electron Interactions With Plasma Processing Gases

View full text Add to dashboard Cite

Vacuum UV fluorescence excitation spectroscopy of BCl3. Electronic spectroscopy of BCl2, BCl2 + and BCl3 +

Cited by 25 publications

References 18 publications

Vacuum ultraviolet fluorescence excitation spectroscopy of BBr₃in the range 8–20 eV

Vacuum ultraviolet fluorescence excitation spectroscopy of BBr₃in the range 8–20 eV

Characterisation of a new VUV beamline at the Daresbury SRS using a dispersed fluorescence apparatus incorporating CCD detection

Electron Interactions with Cl2, CCl2F2, BCl3, and SF6

Contact Info

Product

Resources

About

Vacuum UV fluorescence excitation spectroscopy of BCl3. Electronic spectroscopy of BCl2, BCl2 + and BCl3 +

Cited by 25 publications

References 18 publications

Vacuum ultraviolet fluorescence excitation spectroscopy of BBr3in the range 8–20 eV

Vacuum ultraviolet fluorescence excitation spectroscopy of BBr3in the range 8–20 eV

Characterisation of a new VUV beamline at the Daresbury SRS using a dispersed fluorescence apparatus incorporating CCD detection

Electron Interactions with Cl2, CCl2F2, BCl3, and SF6

Contact Info

Product

Resources

About

Vacuum ultraviolet fluorescence excitation spectroscopy of BBr₃in the range 8–20 eV

Vacuum ultraviolet fluorescence excitation spectroscopy of BBr₃in the range 8–20 eV