Vacuum Packaged Low-Power Resonant MEMS Strain Sensor

Do, Cuong; Erbes, Andreja; Yan, Jize; Soga, Kenichi; Seshia, Ashwin A.

doi:10.1109/jmems.2016.2587867

Cited by 29 publications

(10 citation statements)

References 38 publications

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“…For instance, stretch sensors can be mounted on a wearable device such as a prosthetic hand, data glove, or exoskeleton to provide vital information on the angular orientation of the joints, as illustrated in Figure 1. The use of traditional metallic and semiconducting techniques in this sensing field, though previously demonstrated [1][2][3], has limited potential due to the amount of stretch/strain that the device can undergo before fatigue, which in some areas might be well beyond the traditional strain sensor's capabilities. The term stretch and strain will be interchangeably used here.…”

Section: Introductionmentioning

confidence: 99%

The Development of Highly Flexible Stretch Sensors for a Robotic Hand

et al. 2018

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Demand for highly compliant mechanical sensors for use in the fields of robotics and wearable electronics has been constantly rising in recent times. Carbon based materials, and especially, carbon nanotubes, have been widely studied as a candidate piezoresistive sensing medium in these devices due to their favorable structural morphology. In this paper three different carbon based materials, namely carbon black, graphene nano-platelets, and multi-walled carbon nanotubes, were utilized as large stretch sensors capable of measuring stretches over 250%. These stretch sensors can be used in robotic hands/arms to determine the angular position of joints. Analysis was also carried out to understand the effect of the morphologies of the carbon particles on the electromechanical response of the sensors. Sensors with gauge factors ranging from one to 1.75 for strain up to 200% were obtained. Among these sensors, the stretch sensors with carbon black/silicone composite were found to have the highest gauge factor while demonstrating acceptable hysteresis in most robotic hand applications. The highly flexible stretch sensors demonstrated in this work show high levels of compliance and conformance making them ideal candidates as sensors for soft robotics.

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Section: Introductionmentioning

confidence: 99%

The Development of Highly Flexible Stretch Sensors for a Robotic Hand

et al. 2018

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“…A novel MEMS strain sensor has been prototyped at Cambridge University. The fabrication process of the strain sensor has been reported in Ferri et al (2008Ferri et al ( , 2009Ferri et al ( , 2011, Belsito et al (2013Belsito et al ( , 2016, and Do et al (2016). Double-ended tuning fork (DETF) parallel-plate resonators with reduced coupling gaps (<1 m) have been fabricated as shown in Fig.…”

Section: Low-power Sensor and Energy Harvesting For Lifelong Monitoringmentioning

confidence: 99%

Innovation in Instrumentation, Monitoring, and Condition Assessment of Infrastructure

Soga

2016

Multi-Hazard Approaches to Civil Infrastructure Engineering

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Future-proofing our existing and new infrastructure has become a constant theme in government and industry discussions. To achieve this, we need to understand the performance of our infrastructure better than before both during its construction and throughout its design life. Using recent advances in sensor systems and new technologies from the Internet of Things (IoT), it is hypothesized in this chapter that the rich information obtained from embedded sensors within infrastructure will allow us to develop a new paradigm in designing, constructing, operating, and maintaining our infrastructure systems. The chapter discusses the potential value of sensing not only to understand the behavior of monitored structures but also to make better decisions for management of infrastructure at the asset and city scales with a whole lifecycle-based thinking. New generations of sensor systems that satisfy these new requirements are introduced. IntroductionFuture-proofing our existing and new infrastructure has become a constant theme in government and industry discussions. We face with the fact that our old infrastructure continues to age and require monitoring and remedial interventions. Existing infrastructure is challenged by the need to increase load and usage and the requirement to maintain the existing infrastructure while operating at current capacity. The high cost involved in upgrading will lead to a desire to extend their life. For this reason, a need for better quality asset data to improve decision-making and reduce cost has been highlighted (e.g., HM Treasury 2014).Active monitoring of the construction and operational processes of infrastructure is essential. That is, structures are instrumented to assess their performance against engineering design parameters or predictive models. The current monitoring systems do not fit well with this demand, especially for the long-term behavior.

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“…The domain for such a low-profile, yet intrinsically flexible, is surging in wearable devices, such as prosthetic hands and wired gloves with artificial intelligence, to report the angular orientation of the joints. This trend has become widespread since conventional methods are limited by the strength of stretch before fatigue [38][39][40]. There is a high need for replacing traditional approaches for mechanical perturbation sensing using optical, for example, optical interferometry, or magnetic elements, for example, Hall-effect encoders, with highly accurate, low-cost, compact, and low-profile methods that are integrable with CMOS/MEMS technology.…”

Section: Introductionmentioning

confidence: 99%

Multifunctional Ultrahigh Sensitive Microwave Planar Sensor to Monitor Mechanical Motion: Rotation, Displacement, and Stretch

Abdolrazzaghi

Daneshmand

2020

Sensors

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This paper presents a novel planar multifunctional sensor that is used to monitor physical variations in the environment regarding distance, angle, and stretch. A double split-ring resonator is designed at 5.2 GHz as the core operating sensor. Another identical resonator is placed on top of the first one. The stacked configuration is theoretically analyzed using an electric circuit model with a detailed parameter extraction discussion. This design is first employed as a displacement sensor, and a compelling high sensitivity of 500 MHz/mm is observed for a wide dynamic range of 0-5 mm. Then, in another configuration, the stacked design is used as a rotation sensor that results in a high sensitivity of 4.5 MHz/ ° for the full range of 0-180 ° . In addition, the stacked resonator is utilized as a strain detector, and a 0–30% stretch is emulated with a linear sensitivity of 12 MHz/%. Measurements are well in congruence with simulated results, which proves the accurate functionality of the sensor in tracking mechanical deformations, all in a single compact contraption.

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Vacuum Packaged Low-Power Resonant MEMS Strain Sensor

Cited by 29 publications

References 38 publications

The Development of Highly Flexible Stretch Sensors for a Robotic Hand

The Development of Highly Flexible Stretch Sensors for a Robotic Hand

Innovation in Instrumentation, Monitoring, and Condition Assessment of Infrastructure

Multifunctional Ultrahigh Sensitive Microwave Planar Sensor to Monitor Mechanical Motion: Rotation, Displacement, and Stretch

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