2018
DOI: 10.1116/1.5016181
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Vacuum furnace for degassing stainless-steel vacuum components

Abstract: Ultra-high vacuum systems must often be constructed of materials with ultra-low outgassing rates to achieve pressure of 10 Pa and below. Any component placed into the ultra-high vacuum system must also be constructed of materials with ultra-low outgassing rates. Baking stainless steel vacuum components to a temperature range of 400 °C to 450 °C while under vacuum is an effective method to reduce the outgassing rate of vacuum components for use in ultra-high vacuum systems. The design, construction, and operati… Show more

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Cited by 13 publications
(12 citation statements)
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“…Before use, the CDGs were fired inside a custom-built vacuum furnace 7 for 33 days at approximately 425 • C to reduce hydrogen outgassing, following procedures developed in references 8 and 9. The gauges were not tested prior to this hightemperature bake.…”
Section: Apparatusmentioning
confidence: 99%
“…Before use, the CDGs were fired inside a custom-built vacuum furnace 7 for 33 days at approximately 425 • C to reduce hydrogen outgassing, following procedures developed in references 8 and 9. The gauges were not tested prior to this hightemperature bake.…”
Section: Apparatusmentioning
confidence: 99%
“…The SCE is made from sintered stainless steel powder [15] with approximately 25 nL/s conductance for N 2 near 300 K. The variable volume is constructed from welded bellows made from titanium, which minimizes H 2 outgassing [10]. All stainless steel components except the SCE were baked at 450 °C for at least 20 days in a vacuum furnace to minimize hydrogen outgassing [13].…”
Section: Component Quantificationmentioning
confidence: 99%
“…Such exposure is possible, for example, from contamination in the gas used to fill the flowmeter, and thus a low-outgassing flowmeter must be designed for repeated bakes. Hydrogen outgassing can be more difficult to minimize, requiring either a low hydrogen-outgassing material, like titanium or aluminum [10], or a process of baking the vacuum components at higher temperatures [11,12,13].…”
Section: Introductionmentioning
confidence: 99%
“…We characterize light-induced atomic desorption process by loading a Li MOT within a stainless-steel vacuum chamber. All steel components of the chamber were vacuum baked at 425 • C for 21 days to reduce hydrogen outgassing [35,36]. We did not bake the chamber after assembly to remove H 2 O.…”
Section: Apparatusmentioning
confidence: 99%