Vacuum Components and Movable Mechanism

Abstract

The vacuum components are important components to be used at the boundary of the atmosphere and vacuum, because a vacuum system is not assembled just with the vacuum vessel and the vacuum pumps.The basic technique is a vacuum sealing technique of how to prevent leakage of the atmosphere. I explain vacuum seal technology and vacuum parts as applied technology, ‰anges, valves, vacuum current feedthrough, and the optical window. Movable mechanisms in vacuum are described, too.