UV-NIL replication of microlens arrays on flexible fluoropolymer substrates

Jucius, Dalius; Lazauskas, Algirdas; Grigaliūnas, V.; Abakevičienė, Brigita; Smetona, S.; Tamulevičius, Sigitas

doi:10.1007/s00542-017-3468-8

Cited by 6 publications

(4 citation statements)

References 33 publications

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“…Photocurable low‐viscous acrylate‐based precursors and biomaterials can be used as resists. SFIL has also been used in two‐step imprinting processes to replicate complex structures ( Figure ) . With SFIL, lines of 20 nm width have been fabricated, as well as multilayered structures .…”

Section: Fabrication Methods For 3d Structures With Areas Of Various mentioning

confidence: 99%

“…SFIL has also been used in two-step imprinting processes to replicate complex structures (Figure 8). [158] With SFIL, lines of 20 nm width have been fabricated, as well as multilayered structures. [159] Even 4 nm line widths were demonstrated by imprinting an ion-beam fabricated pattern of HSQ into a PDMS-based UV resist.…”

Section: Step-and-flash Imprint Lithographymentioning

confidence: 99%

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Nanostructure and Microstructure Fabrication: From Desired Properties to Suitable Processes

Assenbergh

Meinders²,

Geraedts

et al. 2018

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When designing a new nanostructure or microstructure, one can follow a processing-based manufacturing pathway, in which the structure properties are defined based on the processing capabilities of the fabrication method at hand. Alternatively, a performance-based pathway can be followed, where the envisioned performance is first defined, and then suitable fabrication methods are sought. To support the latter pathway, fabrication methods are here reviewed based on the geometric and material complexity, resolution, total size, geometric and material diversity, and throughput they can achieve, independently from processing capabilities. Ten groups of fabrication methods are identified and compared in terms of these seven moderators. The highest resolution is obtained with electron beam lithography, with feature sizes below 5 nm. The highest geometric complexity is attained with vat photopolymerization. For high throughput, parallel methods, such as photolithography (≈10 m h ), are needed. This review offers a decision-making tool for identifying which method to use for fabricating a structure with predefined properties.

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Section: Fabrication Methods For 3d Structures With Areas Of Various mentioning

confidence: 99%

Section: Step-and-flash Imprint Lithographymentioning

confidence: 99%

Nanostructure and Microstructure Fabrication: From Desired Properties to Suitable Processes

Assenbergh

Meinders²,

Geraedts

et al. 2018

Small

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show abstract

“…Polymers can be processed at relatively low temperatures and microstructured using a roll-to-roll compatible time-and cost-efficient hot embossing technique [3]. The solubility of polymers allows the manufacturing of devices by an inexpensive and highly efficient solution processing, including UV imprint and ink-jet printing [4,5]. Numerous examples of successful applications of innovative functional polymers can be found in various fields of electronics, optoelectronics, and photonics and include organic photovoltaic devices, light-emitting diodes, thin-film transistors, displays, touchscreens, nonlinear optical devices, and wearable and automotive electronics [1,[5][6][7].…”

Section: Introductionmentioning

confidence: 99%

Electrical Characterization of Thin PEDOT:PSS Films on Alumina and Thiol–Ene Substrates

et al. 2021

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Transparent polymer layers that heal minor scratches and maintain the optical properties of the devices for a long time are highly desirable in optoelectronics. This paper presents the results of the electrical characterization of thin PEDOT:PSS films on the novel, optically transparent thiol–ene substrates capable of healing scratches under room-temperature conditions. Electrical properties of the PEDOT:PSS films deposited on the conventional alumina ceramic substrates were also tested for comparative purposes. This study demonstrated that the substrate can have a significant effect on the electrical properties of PEDOT:PSS films, and the electrical resistance of the films on thiol–ene substrates is not as stable as on alumina ceramics. However, the changes in electrical resistance of the films on thiol–ene are small enough over a sufficiently wide range of operating temperatures and relative humidities and allow the application of such bilayers in various polymeric optoelectronic devices.

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“…In this study Ormocomp® was chosen as it is readily available and extensively used in the fabrication of various microdevices such as microfluidic devices [9][10][11] and cell growth scaffolds [6,7]. The optical transparency of Ormocomp® allows for the fabrication of optical waveguides and sensors [12][13][14][15]. In [10], a free-standing electrophoresis-electrospray device was fabricated in Ormocomp®, demonstrating the feasibility of the material as a substrate for microfabrication.…”

Section: Introductionmentioning

confidence: 99%

Body-Implantable RFID Tags Based on Ormocer Printed Circuit Board Technology

et al. 2020

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This paper demonstrates, for the first time, a biocompatible RFID tag fabricated on an Ormocer substrate, and encapsulated in it. Ormocomp belongs to a group of hybrid organic-inorganic photostructurable materials called Ormocers. It is biocompatible, chemically inert, and electrically insulating-ideal for body-implantable applications. In this study we developed an Ormocomp-based printed circuit board (PCB) and packaging method, and implemented a biocompatible RFID tag. Index Terms-Implantable RFID tag, Ormocer, biocompatible, printed circuit board, packaging I.

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UV-NIL replication of microlens arrays on flexible fluoropolymer substrates

Cited by 6 publications

References 33 publications

Nanostructure and Microstructure Fabrication: From Desired Properties to Suitable Processes

Nanostructure and Microstructure Fabrication: From Desired Properties to Suitable Processes

Electrical Characterization of Thin PEDOT:PSS Films on Alumina and Thiol–Ene Substrates

Body-Implantable RFID Tags Based on Ormocer Printed Circuit Board Technology

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