2006
DOI: 10.1007/s00542-006-0172-5
|View full text |Cite
|
Sign up to set email alerts
|

UV nano embossing for polymer nano structures with non-transparent mold insert

Abstract: In recent years, UV nano embossing (or imprinting) process has been widely used for mass replication of nano structures. Most of the UV embossing machines use a UV transparent mold insert (e.g. quartz or glass). However, when a master of nano structures of interest could be realized only in a UV non-transparent mold material, it would be desirable to have a UV embossing machine which could be operated with such a UV non-transparent mold insert. In this regard, we have designed and manufactured a new UV embossi… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

0
8
0

Year Published

2006
2006
2014
2014

Publication Types

Select...
7
1

Relationship

3
5

Authors

Journals

citations
Cited by 20 publications
(8 citation statements)
references
References 9 publications
0
8
0
Order By: Relevance
“…From the parametric study for the processing conditions in the UV nano embossing process, the appropriate processing condition for the replication of the nanopillar array was found to be curing time of 12 min and applied embossing pressure of 0.2 MPa at room temperature in this particular case (Lee et al 2005b). Figure 4 shows successfully replicated high-aspect-ratio nanopillar arrays on a polymer film from the AAO mold III as a gecko foot-hair prototype.…”
Section: Replication Of Nanopillar Arraysmentioning
confidence: 98%
“…From the parametric study for the processing conditions in the UV nano embossing process, the appropriate processing condition for the replication of the nanopillar array was found to be curing time of 12 min and applied embossing pressure of 0.2 MPa at room temperature in this particular case (Lee et al 2005b). Figure 4 shows successfully replicated high-aspect-ratio nanopillar arrays on a polymer film from the AAO mold III as a gecko foot-hair prototype.…”
Section: Replication Of Nanopillar Arraysmentioning
confidence: 98%
“…(II) Nano-embossing is a promising method of nanostructure preparation, enabling inexpensive and high throughput nanofabrication. It uses a nanostructured stamp to transfer the pattern to the substrate surface via an embossing process [34]. (III) Etching is a subtractive method that selectively removes materials from the substrate.…”
Section: Nanostructure Preparation Techniquesmentioning
confidence: 99%
“…And it does not need any precise alignment steps. The fabricated two-level polymeric microstructure can be used as a mother structure of a nickel electroforming process, resulting in a robust metallic mold insert for mass replication techniques such as micro injection molding (Lee et al 2004), hot embossing (Heckele et al 1998), and/or UV embossing (Lee et al 2007). As an example of the proposed fabrication method, a polymeric high aspect ratio microstructure with smaller square microstructures (200 9 200 9 90 lm) on its top surface was firstly fabricated.…”
Section: Introductionmentioning
confidence: 99%