UV-LED-based projection lithography for rapid high-resolution micro- and nanostructuring

Abstract

The demand on the miniaturization of products has fostered the advancement of high-resolution fabrication technologies. Here, we demonstrate a simple and low-cost UV-LED-based lithography technique for structuring at micro-and nanoscale. The corresponding experimental setup was established with off-the-shelf components and allows for single structuring within seconds based on a standard microscope projection photolithography (MPP) process. Single lines with feature sizes down to 150 nm were successfully produced. In addition, high-resolution gratings, ring resonators as well as arrayed waveguide gratings at the micro-and nanoscale were successfully fabricated as well. This operation-friendly, highly efficient and low-cost approach exhibits great potential in micro-and nanomanufacturing for applications in fields such as nanophotonics, biophotonics and micro-and nanoelectromechanical systems.