2000
DOI: 10.1016/s0169-4332(99)00454-7
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UV laser photodeposition of carbon nitride thin films from gaseous precursors

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Cited by 3 publications
(2 citation statements)
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“…2c). Such morphology is quite similar to the SEM image obtained from the acetylene and acetylene/ammonia mixtures by the laser-CVD photo-polymerization (Pola et al, 2002;Crunteanu et al, 2000). However, it is different from the SEM image of a freestanding film with high crystallinity and fibrilar structure obtained from the Ziegler-Natta catalyst system (Shirakawa and Ikeda, 1971).…”
Section: Film Morphologysupporting
confidence: 55%
See 1 more Smart Citation
“…2c). Such morphology is quite similar to the SEM image obtained from the acetylene and acetylene/ammonia mixtures by the laser-CVD photo-polymerization (Pola et al, 2002;Crunteanu et al, 2000). However, it is different from the SEM image of a freestanding film with high crystallinity and fibrilar structure obtained from the Ziegler-Natta catalyst system (Shirakawa and Ikeda, 1971).…”
Section: Film Morphologysupporting
confidence: 55%
“…The UV laser polymerization from acetylene and ammonia mixtures can produce carbon nitride thin films with high hardness, chemical, and thermal stability (Liu and Cohen, 1990;Crunteanu et al, 2000). Besides, polyacetylenes or substituted polyacetylenes have been shown to be humidity sensitive materials (Li and Yang, 2002a, b;Bearzotti et al, 2001), but few reports have been found for applying plasmapolymerized films from acetylene and/or mixtures to humidity or other chemical sensors.…”
Section: Introductionmentioning
confidence: 99%