UV laser deposition of nanostructured Si/C/O/N/H from disilazane precursors and evolution to silicon oxycarbonitride

Pola, Josef; Galíková, Anna; Bastl, Zdeněk; Šubrt, Ján; Vacek, K.; Brus, Jiřı́; Ouchi, Akihiko

doi:10.1002/aoc.1135

Cited by 5 publications

(3 citation statements)

References 35 publications

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“…Ammonia, nitrous oxide and traces of methane could be detected. Additionally, in agreement with published work, [32] a fine white powder was deposited at the walls of the bulb.…”

supporting

confidence: 81%

Vacuum‐UV Irradiation‐Based Formation of Methyl‐Si‐O‐Si Networks from Poly(1,1‐Dimethylsilazane‐co‐1‐methylsilazane)

Prager

Wennrich

Heller

et al. 2008

Chemistry A European J

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The vacuum-UV (VUV)-induced conversion of commercially available poly(1,1-dimethylsilazane-co-1-methylsilazane) into methyl-Si-O-Si networks was studied using UV sources at wavelengths around 172, 185, and 222 nm, respectively. Time-of-flight secondary ion mass spectroscopy (TOF-SIMS), X-ray photo electron spectroscopy (XPS), and Fourier transform infrared (FTIR) measurements, as well as kinetic investigations, were carried out to elucidate the degradation process. First-order kinetics were found for the photolytically induced decomposition of the Si-NH-Si network, the subsequent formation of the methyl-Si-O-Si network and the concomitant degradation of the Si-CH(3) bond, which were additionally independent of the photon energy above a threshold of about 5.5 eV (225 nm). The kinetics of these processes were, however, dependent on the dose actually absorbed by the layer and, in the case of Si-O-Si formation, additionally on the oxygen concentration. The release of ammonia and methane accompanied the conversion process. Quantum-chemical calculations on methyl substituted cyclotetrasilazanes as model compounds substantiate the suggested reaction scheme. Layers <100 nm in thickness based on mixtures of poly(1,1-dimethylsilazane-co-1-methylsilazane) and perhydropolysilazane (PHPS) were coated onto polyethylene terephthalate (PET) foils by a continuous roll to roll process and cured by VUV irradiation by using wavelengths <200 nm and investigated for their O(2) and water vapor-barrier properties. It was found that the resulting layers displayed oxygen and water vapor transmission rates (OTR and WVTR, respectively) of <1 cm(3) m(-2) d(-1) bar(-1) and <4 g m(-2) d(-1), respectively.

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“…Ammonia, nitrous oxide and traces of methane could be detected. Additionally, in agreement with published work, [32] a fine white powder was deposited at the walls of the bulb.…”

supporting

confidence: 81%

Vacuum‐UV Irradiation‐Based Formation of Methyl‐Si‐O‐Si Networks from Poly(1,1‐Dimethylsilazane‐co‐1‐methylsilazane)

Prager

Wennrich

Heller

et al. 2008

Chemistry A European J

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“…It should be noted that Si-N and Si-CH 3 cleavages were also concluded from product analysis after high-power laser irradiation of gaseous tetra-and hexamethyldisilazanes. 22,23 Therefore this work focuses on the deeper elucidation of the initiation mechanism of the VUV-induced conversion by investigating model compounds (Fig. 1).…”

Section: Introductionmentioning

confidence: 99%

222 nm Photo-induced radical reactions in silazanes. A combined laser photolysis, EPR, GC-MS and QC Study

Knolle

Wennrich

Naumov

et al. 2010

Phys. Chem. Chem. Phys.

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The initiation mechanism of the VUV-induced conversion of polyorganosilazanes into methyl-Si-O-Si networks was studied by means of model disilazane compounds. A combined experimental approach was chosen to determine the primary radicals and their properties (lifetimes, spectra) as well as the major final products. It was verified that both Si-N and Si-CH(3) cleavage occur in the condensed phase, the former with higher yield. The lifetime of the primary Si- and N-centred radicals in de-oxygenated n-hexane solution is less than

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“…Pulsed visible lasers offer even better feature resolution and are also investigated for ceramic processing [34]. While pulsed NIR and visible lasers are actively utilized for additive manufacturing of ceramics, pulsed UV lasers have received less attention [35]. Based on good results on selective laser processing of ceramics with a frequency doubled Nd:YAG laser (532 nm) [36], we chose to investigate frequency tripled (355 nm) and frequency quadrupled (266 nm) pulsed Nd:YAG lasers.…”

Section: Introductionmentioning

confidence: 99%

Pulsed UV Laser Processing of Carbosilane and Silazane Polymers

Blugan

Kuebler

2019

Materials

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Freestanding SiCNO ceramic pieces with sub-mm features were produced by laser crosslinking of carbosilane and silazane polymer precursors followed by pyrolysis in inert atmosphere. Three different pulsed UV laser systems were investigated, and the influence of laser wavelength, operating power and scanning speed were all found to be important. Different photoinitiators were tested for the two lasers operating at 355 nm, while for the 266 nm laser, crosslinking occurred also without photoinitiator. Pre-treatment of glass substrates with fluorinated silanes was found to ease the release of green bodies during solvent development. Polymer crosslinking was observed with all three of the laser systems, as were bubbles, surface charring and in some cases ablation. By focusing the laser beam several millimeters above the surface of the resin, selective polymer crosslinking was observed exclusively.

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UV laser deposition of nanostructured Si/C/O/N/H from disilazane precursors and evolution to silicon oxycarbonitride

Abstract: Megawatt ArF laser photolysis of gaseous methyldisilazanes [(CH

Cited by 5 publications

References 35 publications

Vacuum‐UV Irradiation‐Based Formation of Methyl‐Si‐O‐Si Networks from Poly(1,1‐Dimethylsilazane‐co‐1‐methylsilazane)

Vacuum‐UV Irradiation‐Based Formation of Methyl‐Si‐O‐Si Networks from Poly(1,1‐Dimethylsilazane‐co‐1‐methylsilazane)

222 nm Photo-induced radical reactions in silazanes. A combined laser photolysis, EPR, GC-MS and QC Study

Pulsed UV Laser Processing of Carbosilane and Silazane Polymers

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