High-performance,
monolithic photoactivated gas sensors based on the integration of
gas-sensitive semiconductor metal oxide nanowires on micro light-emitting
diodes (μLEDs) are introduced. The μLEDs showed improved
irradiance and energy conversion efficiency (i.e., external quantum
efficiency, EQE), as the size of LEDs was reduced from 200 ×
200 μm2 (irradiance of 46.5 W/cm2 and
EQE of 4%) to 30 × 30 μm2 (irradiance of 822.4
W/cm2 and EQE of 9%). Gas-sensitive zinc oxide (ZnO) nanowires
were directly synthesized on top of the μLED through a hydrothermal
reaction. The direct contact between the sensing component and μLED
sensor platform leads to high light coupling efficiency, minimizing
power consumption of the sensor. Furthermore, the sensing performance
(i.e., sensitivity) at optimal operating power was improved as the
LED size was reduced. The smallest fabricated gas sensor (active area
= 30 × 30 μm2) showed excellent NO2 sensitivity (ΔR/R
0 = 605% to 1 ppm NO2) at the optimal operating power (∼184
μW). In addition, the sensor showed a low limit of detection
(∼14.9 ppb) and robustness to high humidity conditions, which
demonstrate its potential for practical applications in mobile internet
of things (IoT) devices.