UV-assisted deposition of TEOS SiO2 films using the spin-coating method

Kinashi, Koji; Niwano, Michio; Miyamoto, Nobuo; Honma, Koji

doi:10.1016/0169-4332(94)90432-4

Applied Surface Science

1994

DOI: 10.1016/0169-4332(94)90432-4

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UV-assisted deposition of TEOS SiO2 films using the spin-coating method

Koji Kinashi

Michio Niwano

Nobuo Miyamoto

et al.

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2003

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UV-assisted deposition of TEOS SiO2 films using the spin-coating method

Cited by 1 publication

References 8 publications

Photoinitiated cationic polymerization of cycloaliphatic epoxide with siloxane or alkoxysilane functionalized polyol coatings

Photoinitiated cationic polymerization of cycloaliphatic epoxide with siloxane or alkoxysilane functionalized polyol coatings

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