Utilization of TXRF analytical technique in order to improve front-end semiconductor processing

Budri, Thanas

doi:10.1016/j.apsusc.2008.01.106

“…Control of surface contaminants on Si wafers is one of the most important applications. Budri in the U.S. described in-line TXRF monitoring, which provides analytical information on Al, Ti, and Mo with high throughput and a large sampling area (197). During implantation, which is an important semiconductor process, coimplanting of metallic contaminants occurs.…”

Section: Applicationsmentioning

confidence: 99%

X-ray Spectrometry

Tsuji

¹

,

Nakano

²

,

Takahashi

³

et al. 2010

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Exaggerated anticipatory anxiety is common in social anxiety disorder (SAD). Neuroimaging studies have revealed altered neural activity in response to social stimuli in SAD, but fewer studies have examined neural activity during anticipation of feared social stimuli in SAD. The current study examined the time course and magnitude of activity in threat processing brain regions during speech anticipation in socially anxious individuals and healthy controls (HC). Method Participants (SAD n = 58; HC n = 16) underwent functional magnetic resonance imaging (fMRI) during which they completed a 90s control anticipation task and 90s speech anticipation task.

“…Budri has published an overview on ''the utilization of TXRF in order to improve front-end semiconductor processing''. 284 Although the overview contained only three references, it did summarize how the introduction of in-line TXRF monitoring can provide detailed information on Al, Mo and Ti contamination levels. Since it may be achieved in-line, several process steps may be improved which helps minimize product yield loss and also makes it possible to successfully manufacture multiple products and process geometries in the same fabrication platform.…”

Section: Reviews and Overviews A Review By Pisonero Andmentioning

confidence: 99%

Atomic spectrometry update. Industrial analysis: metals, chemicals and advanced materials

Carter

¹

,

Fisher

²

,

Goodall

³

et al. 2009

J. Anal. At. Spectrom.

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Exaggerated anticipatory anxiety is common in social anxiety disorder (SAD). Neuroimaging studies have revealed altered neural activity in response to social stimuli in SAD, but fewer studies have examined neural activity during anticipation of feared social stimuli in SAD. The current study examined the time course and magnitude of activity in threat processing brain regions during speech anticipation in socially anxious individuals and healthy controls (HC). Method Participants (SAD n = 58; HC n = 16) underwent functional magnetic resonance imaging (fMRI) during which they completed a 90s control anticipation task and 90s speech anticipation task.

D & TOF‐SIMS failure analysis of P‐buried layer from BiCMOS transistors

Budri

¹

,

Sehgal

²

,

Arsenault

³

et al. 2011

Surface & Interface Analysis

Self Cite

Get access via publisher Add to dashboard Cite

Exaggerated anticipatory anxiety is common in social anxiety disorder (SAD). Neuroimaging studies have revealed altered neural activity in response to social stimuli in SAD, but fewer studies have examined neural activity during anticipation of feared social stimuli in SAD. The current study examined the time course and magnitude of activity in threat processing brain regions during speech anticipation in socially anxious individuals and healthy controls (HC). Method Participants (SAD n = 58; HC n = 16) underwent functional magnetic resonance imaging (fMRI) during which they completed a 90s control anticipation task and 90s speech anticipation task.

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Utilization of TXRF analytical technique in order to improve front-end semiconductor processing

Cited by 7 publications

References 3 publications

X-ray Spectrometry

X-ray Spectrometry

Atomic spectrometry update. Industrial analysis: metals, chemicals and advanced materials

D & TOF‐SIMS failure analysis of P‐buried layer from BiCMOS transistors

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