Utilization of 2:1 Internal Resonance in Microsystems

Noori, Navid; Sarrafan, Atabak; Golnaraghi, Farid; Bahreyni, Behraad

doi:10.3390/mi9090448

Cited by 13 publications

(7 citation statements)

References 13 publications

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“…It represents a mechanism for energy transfer from the targeted vibration mode to another mode either in the same [32,33,123,156] or different plane of vibration [31,157,158]. One necessary condition to activate internal resonance is to have an integer ratio between the involved modes.…”

Section: Internal Resonancementioning

confidence: 99%

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Linear and nonlinear dynamics of micro and nano-resonators: Review of recent advances

Hajjaj

Jaber

Ilyas

et al. 2020

International Journal of Non-Linear Mechanics

117

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Micro and nanoelectromechanical systems M/NEMS have been extensively investigated and exploited in the past few decades for various applications and for probing fundamental physical phenomena. Understanding the linear and nonlinear dynamical behaviors of the movable structures in these systems is crucial for their successful implementation in various novel technologies and to meet the long list of new sophisticated requirements. This paper presents a review for some of the recent topics pertaining to the dynamical behaviors, linear and nonlinear, of M/NEMS resonating structures. First, an overview is presented of the various used dynamical approaches to enhance the sensitivity of resonators for sensing applications. Then a summary is presented of the recent works on the linear and nonlinear mode coupling in M/NEMS resonator. Next, recent research is reviewed on coupled M/NEMS resonators, mechanically and electrically, leading to collective behaviors like mode localization. The final part of the paper discusses analytical approaches that have been developed to better understand and investigate the dynamical behavior of M/NEMS resonators focusing on the perturbation method the multiple time scales.

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Section: Internal Resonancementioning

confidence: 99%

“…two-to-one [32,33,156,157,160,161], and three-to-one [30,31,33,123,156] internal resonances are the most investigated in the literature. A recent work on four-to-one internal resonance has been also reported [33].…”

Section: Internal Resonancementioning

confidence: 99%

Linear and nonlinear dynamics of micro and nano-resonators: Review of recent advances

Hajjaj

Jaber

Ilyas

et al. 2020

International Journal of Non-Linear Mechanics

117

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“…This may be valuable for enhancing MEMS/NEMS performances [40], e.g. internal resonances have been recently applied in energy harvesting [41,42], sensitivity [43,44], and response enhancement [45,46]. dark blue for the third mode, in red and dark red for the fifth, respectively.…”

Section: Experimental Dynamicsmentioning

confidence: 99%

Internal resonance in the higher-order modes of a MEMS beam: experiments and global analysis

et al. 2021

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This work investigates the dynamics of a microbeam-based MEMS device in the neighborhood of a 2:1 internal resonance between the third and fifth vibration modes. The saturation of the third mode and the concurrent activation of the fifth are observed. The main features are analyzed extensively, both experimentally and theoretically. We experimentally observe that the complexity induced by the 2:1 internal resonance covers a wide driving frequency range. Constantly comparing with the experimental data, the response is examined from a global perspective, by analyzing the attractor-basins scenario. This analysis is conducted both in the thirdmode and fifth-mode planes. We show several metamorphoses occurring as proceeding from the principal resonance to the 2:1 internal resonance, up to the final disappearance of the resonant and non-resonant attractors. The shape and wideness of all the basins are examined. Despite they are progressively eroded, an appreciable region is detected where the compact cores of the attractors involved in the 2:1 internal resonance remain substantial, which allows effectively operating them under realistic conditions. The dynamical integrity of each resonant branch is discussed, especially as approaching the bifurcation points where the system becomes more vulnerable to the dynamic pull-in instability.

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“…Most of the previous resonators intentionally designed to implement IR were based on atypical structural shapes and modes for M/NEMSs. For example, T-shaped beams 49,50 and H-shaped plates 41,51 were considered to enforce 1:2 IR; the flexural and extensional modes were internally coupled in a twobeam system 30 ; and the flexural and torsional modes were internally coupled in a clamped-clamped beam system 28,39 . The success of these examples comes at the price of unconventional structures and modes imposing additional complications in the design of actuation and transduction electrodes.…”

Section: Introductionmentioning

confidence: 99%

Strong internal resonance in a nonlinear, asymmetric microbeam resonator

2021

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Exploiting nonlinear characteristics in micro/nanosystems has been a subject of increasing interest in the last decade. Among others, vigorous intermodal coupling through internal resonance (IR) has drawn much attention because it can suggest new strategies to steer energy within a micro/nanomechanical resonator. However, a challenge in utilizing IR in practical applications is imposing the required frequency commensurability between vibrational modes of a nonlinear micro/nanoresonator. Here, we experimentally and analytically investigate the 1:2 and 2:1 IR in a clamped–clamped beam resonator to provide insights into the detailed mechanism of IR. It is demonstrated that the intermodal coupling between the second and third flexural modes in an asymmetric structure (e.g., nonprismatic beam) provides an optimal condition to easily implement a strong IR with high energy transfer to the internally resonated mode. In this case, the quadratic coupling between these flexural modes, originating from the stretching effect, is the dominant nonlinear mechanism over other types of geometric nonlinearity. The design strategies proposed in this paper can be integrated into a typical micro/nanoelectromechanical system (M/NEMS) via a simple modification of the geometric parameters of resonators, and thus, we expect this study to stimulate further research and boost paradigm-shifting applications exploring the various benefits of IR in micro/nanosystems.

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Utilization of 2:1 Internal Resonance in Microsystems

Cited by 13 publications

References 13 publications

Linear and nonlinear dynamics of micro and nano-resonators: Review of recent advances

Linear and nonlinear dynamics of micro and nano-resonators: Review of recent advances

Internal resonance in the higher-order modes of a MEMS beam: experiments and global analysis

Strong internal resonance in a nonlinear, asymmetric microbeam resonator

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