Abstract:The abundance of digital calibration information can be leveraged through statistical mining to improve calibration methodologies in tool manufacturing. Historical tool metrology, unable to store massive data, relied on easily processed, summary performance metrics. However, with modern computing power, more computationally expensive methods of large data sets can be used to refine tool and process metrology, accuracy, and reliability. Empirical data from large sets of quartz memory gauges suggest that tools a… Show more
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