Using direct nanoimprinting to study extraordinary transmission in textured metal films

Abstract

In this paper, we describe a thermal embossing imprint method, which we name "nano-imprinting in metal" (NIM), for patterning metal films with a variety of profiles. Metal films exhibiting either perforated hole-arrays or corrugated structures with various surface morphologies can be fabricated rapidly. The SPR phenomenon allowed energy coupling to the other side of the textured metal film, causing a dramatic increase in the transmission. As a technique for readily controlling the working wavelength and transmittance, the NIM method has great potential for application in various optoelectronic devices.

Nanoimprint technology for patterning functional materials and its applications

“…2b and c) [19][20][21] whereas hole arrays were fabricated by using a sharp cone mold ( Fig. 2d and e) [20].…”

“…Besides, the SPR can be excited on the interface of periodical metallic structures and dielectric, and induce an extraordinary transmission (EOT) that overcomes the diffraction limit. The SPR phenomena of metallic nanostructures textured by direct NIL have been studied [20,21]. For example, the corrugated metal film displayed a high EOT in the visible regime.…”

3-D printing of liquid metals for stretchable and flexible conductors

“…[5][6][7][8][9] For example, bulk metallic glasses can be imprinted or molded to replicate features from the macro to nanoscale. [10][11][12] Although the processes require lower temperatures than conventional metal processing, they remain nevertheless elevated (hundreds of degrees) and/or involve significant pressure, conditions that are not compatible with 3-D printing.…”

Ultrafast Fabrication of Metal Nanostructures Using Pulsed Laser Melting

“…Buzzi et al, Pang et al and Hirai et al applied ultra-high pressure of several hundred MPa to directly imprint a solid metal at room temperature (Buzzi 2008, Pang 1998, Hirai 2003. Chen et al and Chuang et al used a mold having a sharp geometry to deform or imprint (penetrate) metal thin films (<50 nm) deposited on a soft polymer bottom layer at pressure of 10-20 MPa and temperature slightly lower than the glass transition temperature of the bottom polymer , Chuang 2008. The above methods suffer from poor patterning resolution and are limited to ductile metals because, during the patterning, the metals are in the hard solid phase.…”