“…In recent years, high-energy lasers have attracted much attention for their wide range of applications in laser illumination, − laser detection, etc. − Lasers exhibit a Gaussian distribution and strong coherence, requiring beam modulation for applications in photolithography, − laser projection, high-performance illumination, etc. − The realization of high-energy laser beam modulation often relies on extremely high threshold materials, which are conventionally used by silica glass. Among a bunch of approaches to beam homogenization, − microlens arrays (MLAs), due to their superior energy utilization, high flexible integration, and high homogeneity, are one of the most commonly used homogenizers. − However, due to the periodicity of the MLAs, interference between beamlets happens, and their related interference fringes appear in the obtained homogenized spots, seriously impacting the uniformity of the spots. To break the coherence between small beams, a continuous profile MLA with random aperture size and arrangement of sub-lenses is proposed, which is generally called random microlens arrays (rMLAs).…”