Using a new design of piezoelectric device for micro-UEDM application

Ting, Yung; Hou, Bing-Kuan; Yu, Cunjiang; Huang, Hsu-Hung; Yeh, Chin-Chih; Wei, Chia-An

doi:10.1109/isaf.2013.6748743

2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy (ISAF/P 2013

DOI: 10.1109/isaf.2013.6748743

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Using a new design of piezoelectric device for micro-UEDM application

Yung Ting

Bing-Kuan Hou

Cunjiang Yu

et al.

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Using a new design of piezoelectric device for micro-UEDM application

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