Using a Multiagent Scheduling System for Dedicated Machine Constraint in Semiconductor Manufacturing

Liu, Alan; Chen, Peter P.; Shr, Arthur M. D.; Cheng, Yen-Ru

doi:10.1109/icsmc.2006.384621

Cited by 4 publications

(2 citation statements)

References 18 publications

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“…2. The effectiveness of FSMCT and FSVCT in reducing the average cycle time and cycle time variation has been validated in many past studies, e.g., Lu et al (1994), Soh1and Kumar (1995, Liu et al (2006), and Shr et al (2006).…”

Section: Introductionmentioning

confidence: 94%

A Fuzzy Fluctuation Smoothing Rule for Job Dispatching in a Wafer Fabrication Factory

Chen

2012

International Journal of Fuzzy System Applications

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Job dispatching in a wafer fabrication factory is a difficult task, mainly due to the complexity of the production system and the uncertainty involved in the production activities. Recently, a number of advanced dispatching rules were proposed, which estimate the remaining cycle times of jobs. This predictive nature is conducive to the effectiveness of these rules. If the uncertainty in the remaining cycle time can be better considered, incorrect scheduling will possibly be reduced. The tailored nonlinear fluctuation smoothing rule for mean cycle time (TNFSMCT) is fuzzified in this study, by expressing the remaining cycle time with a fuzzy value. The effectiveness of the proposed methodology is illustrated with a simulation study.

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Section: Introductionmentioning

confidence: 94%

A Fuzzy Fluctuation Smoothing Rule for Job Dispatching in a Wafer Fabrication Factory

Chen

2012

International Journal of Fuzzy System Applications

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“…The FSS uses the Resource Schedule and Execution Matrix (RSEM) [4,5,6,7,8,9] to manipulate the scheduling process. The fuzzy scheduling model is presented in this Section…”

Section: Fuzzy Scheduling Systemmentioning

confidence: 99%

A Fuzzy Scheduling System for Dedicated Machine Constraint

Shr¹,

Liu²,

Cheng³

2006

Proceedings of the 9th Joint International Conference on Information Sciences (JCIS-06)

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In this paper, we propose the Fuzzy Scheduling System (FSS) to deal with the dedicated machine constraint. The constraint of having a dedicated machine for photolithography process is the new issue introduced in photolithography machinery due to natural bias. If we randomly schedule the wafer lots to arbitrary photolithography machines at the first photolithography stage, then the load of all photolithography machines might become unbalanced. It is the main contributor to the complexity and uncertainty of the semiconductor factory. The FSS is to select the best photolithograph machines for each wafer lot at the first, unconstrained, stage to tackle this dedicated machine constraint and to maintain the load balancing among photolithography machines.

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