Use of the focused ion beam technique to produce a sharp spherical diamond indenter for sub-10 nm nanoindentation measurements

Yu, Ning; Polycarpou, Andreas A.

doi:10.1116/1.1676467

Cited by 17 publications

(7 citation statements)

References 17 publications

(17 reference statements)

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“…Also, a considerable amount of elastic recovery at such shallow indenting depths can underestimate the hardness values. Limited sub-10-nm deep nanoindentation measurements have been reported by Yu and Polycarpou [10] using a custommade spherical indenter, where incorrect hardness values below 10 nm contact depths were obtained (i.e., rapidly increase hardness values with indentation depth near the surface) due to a transition from elastically to plastically dominated deformation.…”

Section: Introductionmentioning

confidence: 99%

Nanomechanical Property and Nanowear Measurements for Sub-10-nm Thick Films in Magnetic Storage

2006

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In the magnetic storage industry, thin film carbon overcoats play a critical role in reducing magnetic and physical spacing between the recording slider and the rotating disk so that the information stored per unit area is maximized. Thin film carbon overcoats have been improved such that they exhibit higher hardness with lower thickness of few nanometers and still being able to perform reliably. In this paper, nanoindentation and nanoscratch techniques to measure nanomechanical properties, namely hardness, elastic modulus and shear strength of thin solid films were presented along with a recently developed high resolution force transducer. Nanowear behavior characterization techniques were also examined and were applied to commercially available magnetic disks to characterize their wear behavior. It was shown that the properties and wear behavior of sub-10-nm thick film carbon overcoats were reliably measured. These techniques could be applied to different thin solid films on substrates, and they are not restricted to magnetic storage systems.

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Section: Introductionmentioning

confidence: 99%

Nanomechanical Property and Nanowear Measurements for Sub-10-nm Thick Films in Magnetic Storage

2006

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“…Diamond microstructures have been fabricated with different techniques based on selective growth/ablation of CVD diamond films with masking and moulding methods [1,2,4,5]. In addition, laser and Focused Ion Beam (FIB) machining have been employed to pattern microstructures directly into diamond [3,14,15,16].…”

Section: Introductionmentioning

confidence: 99%

Characterization of three-dimensional microstructures in single-crystal diamond

Olivero

Rubanov

Reichart

et al. 2006

Diamond and Related Materials

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We report on the Raman and photoluminescence characterization of three-dimensional microstructures created in single-crystal diamond with a Focused Ion Beam (FIB) assisted lift-off technique. The method is based on MeV ion implantation to create a buried etchable layer, followed by FIB patterning and selective etching. In the applications of such microstructures where the properties of high quality single-crystal diamond are most relevant, residual damage after the fabrication process represents a critical technological issue. The results of Raman and photoluminescence characterization indicate that the partial distortion of the sp 3 -bonded lattice and the formation of isolated point defects are effectively removed after thermal annealing, leaving low amounts of residual damage in the final structures. Three-dimensional microstructures in single-crystal diamond offer a large range of applications, such as quantum optics devices and fully integrated opto-mechanical assemblies.

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“…Rapid technical advances now allow resolutions of 0.02 nm in depth, 50 nN in load and 50 nm in spherical diamond tip radius [24]. Niedermann et al [25] developed chemical vapour-deposited (CVD) diamond STM and AFM probes demonstrating outstanding robustness and longevity.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and characterization of boron-doped nanocrystalline diamond-coated MEMS probes

et al. 2016

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Fabrication processes of thin boron-doped nanocrystalline diamond (B-NCD) films on silicon-based micro-and nano-electromechanical structures have been investigated. B-NCD films were deposited using microwave plasma assisted chemical vapour deposition method. The variation in B-NCD morphology, structure and optical parameters was particularly investigated. The use of truncated cone-shaped substrate holder enabled to grow thin fully encapsulated nanocrystalline diamond film with a thickness of approx. 60 nm and RMS roughness of 17 nm. Raman spectra present the typical boron-doped nanocrystalline diamond line recorded at 1148 cm -1 . Moreover, the change in mechanical parameters of silicon cantilevers over-coated with boron-doped diamond films was investigated with laser vibrometer. The increase of resonance to frequency of over-coated cantilever is attributed to the change in spring constant caused by B-NCD coating. Topography and electrical parameters of boron-doped diamond films were investigated by tapping mode AFM and electrical mode of AFM-Kelvin probe force microscopy (KPFM). The crystallite-grain size was recorded at 153 and 238 nm for boron-doped film and undoped, respectively. Based on the contact potential difference data from the KPFM measurements, the work function of diamond layers was estimated. For the undoped diamond films, average CPD of 650 mV and for borondoped layer 155 mV were achieved. Based on CPD values, the values of work functions were calculated as 4.65 and 5.15 eV for doped and undoped diamond film, respectively. Boron doping increases the carrier density and the conductivity of the material and, consequently, the Fermi level.

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Use of the focused ion beam technique to produce a sharp spherical diamond indenter for sub-10 nm nanoindentation measurements

Abstract: Articles you may be interested inHigh-throughput screening of shape memory alloy thin-film spreads using nanoindentation J. Appl. Phys.

Cited by 17 publications

References 17 publications

Nanomechanical Property and Nanowear Measurements for Sub-10-nm Thick Films in Magnetic Storage

Nanomechanical Property and Nanowear Measurements for Sub-10-nm Thick Films in Magnetic Storage

Characterization of three-dimensional microstructures in single-crystal diamond

Fabrication and characterization of boron-doped nanocrystalline diamond-coated MEMS probes

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