1989
DOI: 10.1063/1.100862
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Use of superlattices to realize inverted GaAs/AlGaAs heterojunctions with low-temperature mobility of 2×106 cm2/V s

Abstract: Reproducible realization of high quality inverted interfaces (GaAs on AlGaAs) grown by molecular beam epitaxy is reported. Effective use of thin-layer GaAs/AlAs superlattices in place of an AlGaAs barrier was made to reduce the number of impurities and the roughness at these interfaces. The low-temperature (≂4 K) mobility for electrons at these interfaces is as high as 2×106 cm2/V s for an electron density of ≂5×1011 cm−2—a factor of four improvement over the highest mobility reported for inverted interfaces.

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Cited by 54 publications
(17 citation statements)
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“…[7][8][9] Therefore, the transport characteristics of the 2DEG well reflect the surface characteristics of the GaAs. In addition, the structure without a surface doping layer excludes any possible parallel conduction in a lowdensity region.…”
Section: Formation Of a Two-dimensional Electron Gas In An Inverted Umentioning
confidence: 96%
“…[7][8][9] Therefore, the transport characteristics of the 2DEG well reflect the surface characteristics of the GaAs. In addition, the structure without a surface doping layer excludes any possible parallel conduction in a lowdensity region.…”
Section: Formation Of a Two-dimensional Electron Gas In An Inverted Umentioning
confidence: 96%
“…Enabled by the progress in molecular beam epitaxy (MBE) technology [3], the GaAs system has become the benchmark for the highest material quality and has paved the way to very long carrier mean-free paths and high mobilities [4]. The present state of the MBE art allows precise control of a number of growth parameters, such as substrate temperature, rate, material composition, and growth interrupts, which critically affect scattering mechanisms and carrier mobilities [5][6][7][8][9]. Generally, quantum wells (QWs) doped from both sides have to be narrower than triangular modulation-doped single-sided GaAlAs/GaAs QWs to avoid second subband occupation at high carrier concentrations [10].…”
mentioning
confidence: 99%
“…Thus, electron (2DEG) density can be varied homogeneously throughout the sample, irrespective of the sample geometry or the contact configuration. Although it is difficult to obtain a high-quality 2DEG in an inverted heterostructure, this difficulty is overcome by using a GaAs/AlAs short-period superlattice barrier in place of a thick AlGaAs barrier [4,6].…”
Section: Introductionmentioning
confidence: 99%