Use of a Precision Mercury Manometer with Capacitance Sensing of the Menisci

Jager, Johan de

doi:10.1088/0026-1394/30/6/002

Cited by 25 publications

(15 citation statements)

References 9 publications

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“…The length measurement in the column is either accomplished by optical interferometry from above to the surface [1,2] or by phase sensitive measurement of the travel path time of ultrasound pulses within the mercury from the bottom [3,4]. The main uncertainty contributions near 10 5 Pa come in this order from the uncertainty of temperature of the mercury determining its density, the uncertainty of the mercury density under standard conditions and the column height measurement.…”

Section: Primary Standards For Vacuummentioning

confidence: 99%

Traceability to SI units for vacuum measurement in industrial applications

Jousten

2012

Measurement

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Section: Primary Standards For Vacuummentioning

confidence: 99%

Traceability to SI units for vacuum measurement in industrial applications

Jousten

2012

Measurement

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“…The 3.9 of 0 /10 -6 Pressure distortion 5.5 10 -6 calculated using a coefficient λ/MPa -1 simple method Relative uncertainty of p 0.8 at maximal pressure due to λ determination/10 -6 Mean piston density with (4200 ± 100) uncertainty/(kg/m 3 ) Piston mass with (0.200 0192 ± 0.000 0010) uncertainty/kg p , linear thermal expansion 5.5 10 -6 coefficient of piston/ C -1 c , linear thermal expansion 4.5 10 -6 coefficient of cylinder/ C -1 0 , reference temperature/ C 20 relative uncertainty for is 2.5 10 -6 at 0.1 MPa. A detailed description with full uncertainty budget is given in [4].…”

Section: Standard Mercury Manometermentioning

confidence: 99%

“…A few pascals of line pressure fulfil these conditions. The calculation of the absolute pressure measured by the mercury manometer is described in Section 2 of [4]. The analytical method applied to calculate the uncertainty of the measured gauge and absolute pressures is outlined in [4,6].…”

Section: Technical Details Of Measurements With Mercury Manometermentioning

confidence: 99%

Nitrogen Incorporation Mechanism and Dependence of Site-Competition Epitaxy on the Total Gas Flow Rate for 6H-SiC Epitaxial Layers Grown by Chemical Vapor Deposition

Aigo¹,

Kanaya²,

Katsuno³

et al. 2001

Jpn. J. Appl. Phys.

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This report describes pressure comparison measurements in the range 0.07 MPa to 0.4 MPa between the Czech Institute of Metrology (CMI) and the Physikalisch-Technische Bundesanstalt (PTB) in the period 9 to 13 March 1998 at the Pressure Section of the PTB, Braunschweig. The transfer standard used was a gasoperated piston-cylinder assembly with a ceramic piston of nominal effective area 10 cm 2 and a tungsten-carbide cylinder, installed in a pressure balance base unit, model PG 7601, manufactured by DH Instruments, USA. The measurements compare the effective area of the transfer piston-cylinder assembly as determined from dimensional data at the CMI with effective area data obtained from pressure measurements (i) in gauge mode with the primary standard pressure balance and (ii) in absolute and gauge mode with the primary standard dual-cistern mercury manometer of the PTB. Both primary standard instruments have been used in the international comparison measurements organized by the Consultative Committee for Mass and Related Quantities (CCM) of the Comité International des Poids et Mesures. It may be seen that geometrical measurement values of the effective area agree with results from the PTB and that the relative difference between the effective area is minimal: for the standard pressure balance, 3.4 10 -6 for absolute pressure, 3.4 10 -6 for gauge pressure; and for the dual-cistern mercury manometer, 1.8 10 -6 for gauge mode. The relative difference between the experimental absolute and gauge mode for the dual-cistern mercury manometer is 1.5 10 -6 .

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“…[1][2][3][4][5] The various national standards labs and other metrology labs, have reported uncertainties of 0.15%-0.3% of reading in the range of pressures from 0.1 to 1 Pa, and somewhat better in the range extending to 10 Pa. [6][7][8][9][10] A calibration technique being developed in this facility is based on the gravitational force applied to a diaphragm, while tilted at known angles relative to horizontal. [1][2][3][4][5] The various national standards labs and other metrology labs, have reported uncertainties of 0.15%-0.3% of reading in the range of pressures from 0.1 to 1 Pa, and somewhat better in the range extending to 10 Pa. [6][7][8][9][10] A calibration technique being developed in this facility is based on the gravitational force applied to a diaphragm, while tilted at known angles relative to horizontal.…”

Section: Introductionmentioning

confidence: 99%

Primary pressure standard for calibration in the medium vacuum range

Hinkle

Provost

Surette

1997

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Wide dynamic range silicon diaphragm vacuum sensor by electrostatic servo systemPrimary standards for gas pressure in the range from ϳ0.1 to 10 Pa ͑1 to 100 mTorr͒ have received a significant amount of attention in recent years. The interest in the calibration capability in this vacuum range is, to some degree, driven by the increasingly stringent requirements for the semiconductor processing industry. We present a new standard that is based on calculating the gas pressure required to restore a diaphragm to a null position, while the diaphragm is tilted to various, measured inclinations. With this as a basis, the calculations are relatively simple; there are no gas property dependent effects; and the system design is simple, robust, and easily automated. A formal evaluation of uncertainty for the system being developed in this facility is reviewed and compared with other primary standards. For the medium vacuum range, it is anticipated that this standard will offer numerous practical advantages relative to liquid manometers, dead weight testers, volume expansion systems, and conductance-based systems. It is intended that this technique will enable more widespread capability for the calibration, and verification of vacuum gauging in a pressure range of critical interest to many processes.

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Use of a Precision Mercury Manometer with Capacitance Sensing of the Menisci

Cited by 25 publications

References 9 publications

Traceability to SI units for vacuum measurement in industrial applications

Traceability to SI units for vacuum measurement in industrial applications

Nitrogen Incorporation Mechanism and Dependence of Site-Competition Epitaxy on the Total Gas Flow Rate for 6H-SiC Epitaxial Layers Grown by Chemical Vapor Deposition

Primary pressure standard for calibration in the medium vacuum range

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