Use Of A Capillary X-Ray Focused Beam To Investigate The Chemical Composition Of CdZnTe Wafers With High Resolution CdZnTe Detectors

Abstract

The control of the concentration of Zn and its fluctuation in the high pressure Bridgman grown CdZnTe crystals is part of our characterization work on the ternary grown ingots grown in house. In order to reach both high sensitivity and high position resolution, we have developed a new system consisting of a X-ray generator, coupled to a focusing X-ray capillary, delivering intense beams in the micron scale, since the intensity gain is around a factor of 100 compared to conventional methods.The characteristic X-rays are measured through a high resolution CdZnTe detector (225 eV at 5.9 keV FWHM) cooled by a Peltier system. The results of our investigations on different kinds of crystals will be discussed.

X-ray fluorescence spectrometry

“…The application described in this work was the characterization of the structure of ultra-large-scale integrated circuits which incorporated titanium silicide components and aluminium connections on a silicon substrate. Continuing with the theme of semiconductor components, Fougeres et al 199 developed a new micro-¯uorescence instrument comprising an X-ray generator coupled to an X-ray focusing capillary with a high resolution CdZnTe detector (225 eV resolution FWHM at 5.9 keV). This instrument was used to control the concentration of Zn and its ¯uctuation in high pressure Bridgman-grown CdZnTe crystals.…”