Use and treaceable calibration of autocollimators for ultra-precise measurement of slope and topography

Geckeler, Ralf D.; Weingaertner, Ingolf; Just, A.; Probst, R

doi:10.1117/12.445620

Cited by 29 publications

(23 citation statements)

References 7 publications

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“…Basically, such systems can be classified according to the measurand: most common are systems with the distance [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19][20], the slope [21][22][23][24][25][26][27][28] or the curvature [29][30][31] as the measurand.…”

Section: Introductionmentioning

confidence: 99%

System of four distance sensors for high-accuracy measurement of topography

Weingärtner

Elster

2004

Precision Engineering

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Section: Introductionmentioning

confidence: 99%

System of four distance sensors for high-accuracy measurement of topography

Weingärtner

Elster

2004

Precision Engineering

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“…In the last few years, two methods of topography determination have been developed [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18] whose focus is on the measurement of the form of a surface with a very low uncertainty. They are based on the measurement of intrinsic properties of the surface to make long measurement times possible.…”

Section: Introductionmentioning

confidence: 99%

Uncertainty of topography determination based on slope difference or curvature measuring systems in laboratory and industrial environments

Schulz

2003

SPIE Proceedings

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In the past few years two form or topography measuring methods have been developed at PTB that are based on measuring the slope (angle) difference or the curvature, which both are intrinsic properties of the surface. In a laboratory environment the methods offer a very low uncertainty of measurement down to, or in part even below, the nanometer range. One of them is the Extended Shear Angle Difference method (ESAD), in which the angle difference signal of two surface points separated by a rather large shear is the basic measurement signal obtained with an autocollimation telescope. The other is Large Area Curvature Scanning (LACS) where the curvature values of the surface elements along a scan line are captured by a small interferometer.Error and uncertainty considerations are given for these methods which form the basis for determining the uncertainty which can be achieved under well optimized environmental conditions as necessary for tracing back and calibrating other measuring systems. Additionally, the uncertainty that can be reached in an industrial environment is discussed, and solutions are described to use these promising techniques also in such cases.

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“…Application of autocollimators in profilometry requires more specific calibration of these devices [66,67]. Due to special use of autocollimators in profilometers, it is also advisable to check the behaviour of both autocollimator axes (X and Y) since the crosstalk effect was observed in many autocollimators, when the axis values are used in extreme ranges (e.g.…”

Section: Further Requirements and Investigations In Calibration Of Aumentioning

confidence: 99%

Pushing the limits: latest developments in angle metrology for the inspection of ultra-precise synchrotron optics

2014

Self Cite

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The requirements on the quality of ultra-precise X-ray optical components for application in the Synchrotron Radiation (SR) community are increasing continually and strongly depend on the quality of the metrology devices available to measure such optics. To meet the upcoming accuracy goal of 50 nrad rms for slope measuring profilers, a dedicated project, SIB58 Angles, consisting of 16 worldwide partners and supported by the European Metrology Research Programme (EMRP) was started in Sep 2013. The project covers investigations on autocollimators under extremely challenging measuring conditions, ray-tracing models, 2D autocollimator calibration (for the first time worldwide), determination of error sources in angle encoders providing traceability by 'sub-division of 2π rad' with nrad uncertainty, angle generation by 'ratio of two lengths' in nrad level, and on the development of portable precise Small Angle Generators (SAGs) for regular in-situ checks of autocollimators' performance. Highlights from the project will be reported in the paper and the community of metrology for X-Ray and EUV Optics will be informed about its progress and the latest work in angle metrology.

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Use and treaceable calibration of autocollimators for ultra-precise measurement of slope and topography

Cited by 29 publications

References 7 publications

System of four distance sensors for high-accuracy measurement of topography

System of four distance sensors for high-accuracy measurement of topography

Uncertainty of topography determination based on slope difference or curvature measuring systems in laboratory and industrial environments

Pushing the limits: latest developments in angle metrology for the inspection of ultra-precise synchrotron optics

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