Upper limits for the residual aberrations of a high-resolution aberration-corrected STEM

Haider, Max; Uhlemann, Stephan; Żach, J.

doi:10.1016/s0304-3991(99)00194-1

Cited by 166 publications

(108 citation statements)

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“…The illumination aberration corrector is an improved version of the hexapole corrector (Haider et al 2000), suitably upgraded to minimize the impact of sixfold astigmatism A 5 (Müller et al 2006). It is configured to fully correct coherent axial aberrations up to fifth-order spherical aberration C 5 .…”

Section: Instrument Parameters and Performancementioning

confidence: 99%

“…The instrument uses the standard three-condenser lens system of the Titan 80-300 column to provide variable probe convergence angles in STEM mode and adjustable parallel illumination in TEM mode. An advanced probe corrector derived from the hexapole-type corrector from CEOS corrects for objective lens illumination aberrations (Haider et al 2000;Müller et al 2006). The imaging aberration corrector is a hexapole-type corrector from CEOS (Haider et al 1998).…”

Section: Instrument Parameters and Performancementioning

confidence: 99%

“…Both correctors on TEAM 0.5 correct for coherent lens aberrations, in particular the spherical aberration of the objective lens, and partially for higher order aberrations and resulting parasitic aberrations. The correctors impose a slight increase in the chromatic aberration of the system, changing the inherent C c of the objective lens from 1.64 to approximately 2.1 mm with the correctors activated, for both TEM and STEM operating modes.The illumination aberration corrector is an improved version of the hexapole corrector (Haider et al 2000), suitably upgraded to minimize the impact of sixfold astigmatism A 5 (Müller et al 2006). It is configured to fully correct coherent axial aberrations up to fifth-order spherical aberration C 5 .…”

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confidence: 99%

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Background, status and future of the Transmission Electron Aberration-corrected Microscope project

Dahmen

Erni

Radmilović

et al. 2009

Phil. Trans. R. Soc. A.

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The strong interaction of electrons with small volumes of matter make them an ideal probe for nanomaterials, but our ability to fully use this signal in electron microscopes remains limited by lens aberrations. To bring this unique advantage to bear on materials research requires a sample space for electron scattering experiments in a tunable electron-optical environment. This is the vision for the Transmission Electron Aberrationcorrected Microscope (TEAM) project, which was initiated as a collaborative effort to re-design the electron microscope around aberration-correcting optics. The resulting improvements in spatial, spectral and temporal resolution, the increased space around the sample and the possibility of exotic electron-optical settings will enable new types of experiments. This contribution will give an overview of the TEAM project and its current status, illustrate the performance of the TEAM 0.5 instrument, with highlights from early applications of the machine, and outline future scientific opportunities for aberration-corrected microscopy.Keywords: aberration correction; depth sectioning; monochromator; single-atom detection; light atom imaging; electron microscopy Overview of the Transmission Electron Aberration-corrected Microscope projectRecent advances in aberration-correcting electron optics have led to increased resolution, sensitivity and signal-to-noise (S/N) ratio in atomic resolution microscopy. These advances have created the opportunity to directly observe the atomic-scale order, electronic structure and dynamics of individual nanoscale objects by advanced transmission electron microscopy (TEM). To take advantage of this opportunity, the Transmission Electron Aberration-corrected Microscope (TEAM) project was initiated to optimize the electron microscope around aberration-corrected electron optics and to further advance the limits of the instrument and the technique. The project brings together several leading microscopy groups supported by the US Department of Energy's (DOE's) Office *Author for correspondence (udahmen@lbl.gov).One contribution of 14 to a Discussion Meeting Issue 'New possibilities with aberration-corrected electron microscopy'. http://www.science.doe.gov). After its completion, the instrument will be made available to the scientific user community at the National Center for Electron Microscopy (NCEM).The vision for the TEAM project is the idea of providing a sample space for electron scattering experiments in a tunable electron-optical environment by removing some of the constraints that have limited electron microscopy until now. The resulting improvements in spatial, spectral and temporal resolution, the increased space around the sample and the possibility of setting up novel electronoptical configurations will enable new types of experiments in electron scattering. The TEAM microscope will feature unique corrector elements for spherical and chromatic aberrations, a novel atomic-force-microscopy-inspired specimen stage, a high-brightness gun and numerous other in...

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Section: Instrument Parameters and Performancementioning

confidence: 99%

Section: Instrument Parameters and Performancementioning

confidence: 99%

mentioning

confidence: 99%

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Background, status and future of the Transmission Electron Aberration-corrected Microscope project

Dahmen

Erni

Radmilović

et al. 2009

Phil. Trans. R. Soc. A.

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“…The advantages of aberration-correction in a STEM geometry are that it provides smaller illuminating probes together with higher beam currents as has been described previously [10,11]. A sextupole corrector, identical to the one described earlier for HRTEM imaging, is used to correct the pre-specimen optics operating in an effectively inverted configuration.…”

Section: Aberration Corrected Stem Imagingmentioning

confidence: 99%

Applications of the Oxford-JEOL aberration-corrected electron microscope

Nellist

Kirkland

2010

Philosophical Magazine

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“…This combination has been realized on a FEI Titan system equipped with a Wien-filter type monochromator and a hexapole probe C S corrector [3] operated at 300 and 200 kV. While the monochromator enables a high energy resolution in EELS, more than counterbalancing the loss of current induced by the monochromator, the C S corrector warrants that a small electron probe of high current can be formed.…”

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confidence: 99%

A New Era of Analysis with Spherical-Abervation Corrected STEM - Atomic and Electronic Information Approaching the Single Atom Level

Stam¹,

Erni²,

Kujawa³

et al. 2006

Microsc Microanal

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A corrector for the spherical aberration in the probe-forming optical part of a transmission electron microscope allows for increasing the spatial resolution in scanning transmission mode [1]. By collecting electrons scattered to high angles, atomic-number (Z) sensitive maps can be recorded -at a resolution beyond the one-Ångström barrier. Such Z-contrast micrographs make it possible to extract direct structural information of materials and their defects on the atomic level.Besides the high spatial resolution feasible with a probe C S corrector, electron probes of high current can be formed. The increased probe current is particularly beneficial for analytical work on the atomic scale. Recent developments of electron optical devices have also lead to the realization of electron monochromators [2]. An electron monochromator implemented between the electron source and the illumination system reduces the energy spread of the incident electron beam. Apart from improving the information limit in HRTEM, an electron monochromator significantly enhances the information content in electron energy-loss spectra; electron energy-loss spectroscopy can ultimately be performed with an energy resolution approaching 100 meV at 300 keV primary energy.The integration of an electron monochromator AND a probe C S corrector in one system allows for combining their benefits. This combination has been realized on a FEI Titan system equipped with a Wien-filter type monochromator and a hexapole probe C S corrector [3] operated at 300 and 200 kV. While the monochromator enables a high energy resolution in EELS, more than counterbalancing the loss of current induced by the monochromator, the C S corrector warrants that a small electron probe of high current can be formed. High energy-resolution electron energy-loss spectroscopy on the atomic scale has thus become feasible.This advanced analytical capability in STEM will certainly touch physical limits in materials science. For HR-EELS requires a high dispersion of the spectrometer, the electron dose needed to record a signal of sufficient signal-to-noise ratio has to be larger than in conventional EELS working at lower dispersions. The electron dose a single atomic column can stand is therefore a critical value. Another limiting factor to consider is the localization of the EELS signal. The localization of inelastic electron scattering is controversial; performing electron energy-loss spectroscopy with an atomic-size monochromated electron probe will help to reveal the ultimate spatial resolution which can be achieved in core-loss and valence-loss electron energy-loss spectroscopy.In this contribution, utilization examples of probe C S corrector and monochromator and their combination will be described. The combination of these technologies is anticipated to opening doors for researchers to study morphology, crystallography, elemental and chemical composition as well as electronic structure at resolution levels not demonstrated before in one instrument.

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Upper limits for the residual aberrations of a high-resolution aberration-corrected STEM

Cited by 166 publications

References 12 publications

Background, status and future of the Transmission Electron Aberration-corrected Microscope project

Background, status and future of the Transmission Electron Aberration-corrected Microscope project

Applications of the Oxford-JEOL aberration-corrected electron microscope

A New Era of Analysis with Spherical-Abervation Corrected STEM - Atomic and Electronic Information Approaching the Single Atom Level

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