Unveiling the optical properties of a metamaterial synthesized by electron-beam-induced deposition

Woźniak, Paweł; Höflich, Katja; Brönstrup, Gerald; Banzer, Peter; Christiansen, Silke; Leuchs, Gerd

doi:10.1088/0957-4484/27/2/025705

Cited by 9 publications

(11 citation statements)

References 36 publications

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“…2 ). In contrast to other FEBID materials [ 20 ], no correlation between the pad thickness and the dielectric function was found.…”

Section: Resultscontrasting

confidence: 68%

“…This makes standard measurements like ellipsometry very time consuming or even unrealistic. To find the permittivity values for the investigated copper precursor, µ-spectroscopy on the deposited pads was used [ 20 ]. Reflection and transmission were determined for FEBID pads with side lengths of 10 × 10 μm deposited on a glass substrate covered with a 50 nm layer of ITO.…”

Section: Resultsmentioning

confidence: 99%

“…A brute force algorithm compared the obtained spectra to analytically calculated spectra of the corresponding multilayer system by scanning the n-k-space for the FEBID material. Thereby, the optical constants were retrieved [ 20 ]. Fig.…”

Section: Resultsmentioning

confidence: 99%

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A novel copper precursor for electron beam induced deposition

Haverkamp¹,

Sarau²,

Polyakov³

et al. 2018

Beilstein J. Nanotechnol.

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A fluorine free copper precursor, Cu(tbaoac)2 with the chemical sum formula CuC16O6H26 is introduced for focused electron beam induced deposition (FEBID). FEBID with 15 keV and 7 nA results in deposits with an atomic composition of Cu:O:C of approximately 1:1:2. Transmission electron microscopy proved that pure copper nanocrystals with sizes of up to around 15 nm were dispersed inside the carbonaceous matrix. Raman investigations revealed a high degree of amorphization of the carbonaceous matrix and showed hints for partial copper oxidation taking place selectively on the surfaces of the deposits. Optical transmission/reflection measurements of deposited pads showed a dielectric behavior of the material in the optical spectral range. The general behavior of the permittivity could be described by applying the Maxwell–Garnett mixing model to amorphous carbon and copper. The dielectric function measured from deposited pads was used to simulate the optical response of tip arrays fabricated out of the same precursor and showed good agreement with measurements. This paves the way for future plasmonic applications with copper-FEBID.

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“…2 ). In contrast to other FEBID materials [ 20 ], no correlation between the pad thickness and the dielectric function was found.…”

Section: Resultscontrasting

confidence: 68%

Section: Resultsmentioning

confidence: 99%

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A novel copper precursor for electron beam induced deposition

Haverkamp¹,

Sarau²,

Polyakov³

et al. 2018

Beilstein J. Nanotechnol.

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“…As anticipated by K. Höflich et al [98] and discussed also more recently by P. Wozniak et al and colleagues, [101] the main limitation of such a technology with respect to photonics and plasmonics applications is represented by the low purity level of the process. The organic nature of commonly used precursors and the Gallium ion implantation must be considered when looking at the effective chemical composition of nanostructures realized in this frame.…”

Section: Optical Activity Of Micro/nanohelices By Focused Ion And/or mentioning

confidence: 86%

Materials and 3D Designs of Helix Nanostructures for Chirality at Optical Frequencies

Passaseo

Esposito

Cuscunà

et al. 2017

Advanced Optical Materials

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The capability to fully control the chiro‐optical properties of metamaterials has drawn considerable attention due to developments in metamaterial fabrication techniques and a deeper understanding of the light–matter interaction, enabling a number of applications from integrated photonics to life sciences. From simple geometrical studies on single helix shaped metamaterials, both the design complexity and nanofabrication capability are steadily increasing allowing to extend their properties to the visible regime and beyond. In this work, helix‐shaped micro‐ and nanostructures are reviewed, which have the possibility to modulate their optical response in the linear regime at optical frequencies by spatial arrangement or by constitutive material. An overview of different theories describing the general optical operation of chiral media and a discussion on experimental results obtained by the state‐of‐the‐art helix structures realized by different fabrication techniques is provided. Finally, advanced designs for improved functionality envisaged to match practical applications or to enable new optical multifunctionalities are compared. Even if many applications have been envisaged only theoretically, the continuous effort and progress shown by the research community engaged in this field suggests that helical chiral metamaterials could represent a disruptive breakthrough for advanced optical devices.

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“…Among all FEBID materials, Au is of special interest because its superior properties that make it highly suitable for use in micro- and nanotechnology, as well as in nanomedicine [ 30 ]. Many applications require precise positioning of Au structures on the nanoscale, e.g., for fabrication of interconnects [ 31 – 32 ] and field emission tips [ 33 ] or in direct writing of plasmonic and photonic nanostructures and devices [ 4 , 34 – 40 ]. We recently utilized FEBID of Au to directly write metal-oxide-semiconductor capacitors [ 41 ] and to deposit Au nanocatalyst templates for Si nanowire syntheses [ 42 ].…”

Section: Introductionmentioning

confidence: 99%

Direct writing of gold nanostructures with an electron beam: On the way to pure nanostructures by combining optimized deposition with oxygen-plasma treatment

Belić

Shawrav

Bertagnolli

et al. 2017

Beilstein J. Nanotechnol.

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This work presents a highly effective approach for the chemical purification of directly written 2D and 3D gold nanostructures suitable for plasmonics, biomolecule immobilisation, and nanoelectronics. Gold nano- and microstructures can be fabricated by one-step direct-write lithography process using focused electron beam induced deposition (FEBID). Typically, as-deposited gold nanostructures suffer from a low Au content and unacceptably high carbon contamination. We show that the undesirable carbon contamination can be diminished using a two-step process – a combination of optimized deposition followed by appropriate postdeposition cleaning. Starting from the common metal-organic precursor Me2-Au-tfac, it is demonstrated that the Au content in pristine FEBID nanostructures can be increased from 30 atom % to as much as 72 atom %, depending on the sustained electron beam dose. As a second step, oxygen-plasma treatment is established to further enhance the Au content in the structures, while preserving their morphology to a high degree. This two-step process represents a simple, feasible and high-throughput method for direct writing of purer gold nanostructures that can enable their future use for demanding applications.

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Unveiling the optical properties of a metamaterial synthesized by electron-beam-induced deposition

Cited by 9 publications

References 36 publications

A novel copper precursor for electron beam induced deposition

A novel copper precursor for electron beam induced deposition

Materials and 3D Designs of Helix Nanostructures for Chirality at Optical Frequencies

Direct writing of gold nanostructures with an electron beam: On the way to pure nanostructures by combining optimized deposition with oxygen-plasma treatment

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