Unusual features of laser ablation of supported thin films

Abstract

Laser ablation of layer structures made of optically and thermally dissimilar materials is markedly different from ablation of homogeneous bulk materials. In the case of supported thin films the ablation characteristics are influenced by the variation of the material properties at the interface. This concept is highlighted by comparing experimental and thermal calculation data on pulsed laser ablation of metal, tin oxide and indium-tin oxide films from glass support to those ofcharacterising bulk ablation.