2021
DOI: 10.1364/oe.438564
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Unsupervised anomaly detection of MEMS in low illumination based on polarimetric Support Vector Data Description

Abstract: Low illuminated images make it challenging to conduct anomaly detection on material surface. Adding polarimetric information helps expand pixel range and recover background structure of network inputs. In this letter, an anomaly detection method in low illumination is proposed which utilizes polarization imaging and patch-wise Support Vector Data Description (SVDD) model. Polarimetric information of Micro Electromechanical System (MEMS) surface is captured by a division-of-focal- plane (DoFP) polarization came… Show more

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Cited by 3 publications
(1 citation statement)
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“…However, the MSA methods may not function because the collected process data present characteristics such as strong nonlinearity and non-Gaussian distribution. Recently, with the improvement of computing hardware, deep learning based on deep networks has achieved great success in computer vision fields such as face recognition and target detection [14][15][16][17][18][19]. Due to the powerful capabilities of nonlinear data processing and deep feature learning, many abnormal data detection approaches using deep learning have been widely applied in industrial processes.…”
Section: Introductionmentioning
confidence: 99%
“…However, the MSA methods may not function because the collected process data present characteristics such as strong nonlinearity and non-Gaussian distribution. Recently, with the improvement of computing hardware, deep learning based on deep networks has achieved great success in computer vision fields such as face recognition and target detection [14][15][16][17][18][19]. Due to the powerful capabilities of nonlinear data processing and deep feature learning, many abnormal data detection approaches using deep learning have been widely applied in industrial processes.…”
Section: Introductionmentioning
confidence: 99%