2013
DOI: 10.3390/ma6125602
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Uniform and Conformal Carbon Nanofilms Produced Based on Molecular Layer Deposition

Abstract: Continuous and uniform carbon nanofilms (CNFs) are prepared by pyrolysis of polyimide films which are produced by molecular layer deposition (MLD). The film thickness can be easily controlled at nanometer scale by altering the cycle numbers. During the annealing process at 600 °C, the polyimide film is subject to shrinkage of 70% in thickness. The obtained CNFs do not exhibit a well-graphitized structure due to the low calcination temperature. No clear pore structures are observed in the produced films. CNFs g… Show more

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Cited by 24 publications
(21 citation statements)
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“…Both the C=O and C-O bonds are attributed to the presence of residual organics [49,50], which are chemically adsorbed on the pattern surface. In the C 1 s spectrum, the peaks at 284.8, 286, and 288.2 eV are, respectively, assigned to the C-C, C-O/C-N, and C=O bonds [51,52]. The atomic concentration of C-O/C-N and C=O bonds decreases from 44.62 to 29.03% as the N e increases (calculated based on their peak areas relative to that of the C-C bond), suggesting these adsorptions decrease as the pattern dissolves.…”
Section: Resultsmentioning
confidence: 99%
“…Both the C=O and C-O bonds are attributed to the presence of residual organics [49,50], which are chemically adsorbed on the pattern surface. In the C 1 s spectrum, the peaks at 284.8, 286, and 288.2 eV are, respectively, assigned to the C-C, C-O/C-N, and C=O bonds [51,52]. The atomic concentration of C-O/C-N and C=O bonds decreases from 44.62 to 29.03% as the N e increases (calculated based on their peak areas relative to that of the C-C bond), suggesting these adsorptions decrease as the pattern dissolves.…”
Section: Resultsmentioning
confidence: 99%
“…C–N + binding energy of 401.9 eV is reported by Cheng and coworker [ 60 ]. Quaternary N at 401.1 eV is reported by Qin’s group [ 61 ]. We presume that the peak at 400.86 eV could also be attributed to quaternary alkyl amines derived from EDA.…”
Section: Resultsmentioning
confidence: 99%
“…The current density of the commercial Pt/C and Pt/CNTs catalysts decreases by 91% and 96% after 3600 s, respectively, while that of the 50NC-Pt/CNTs sample decreases by 79%, implying a higher tolerance to the poisonous species generated during the methanol oxidation process. with numerous micropores and mesopores [25]. The porous structure allows the underlying Pt NPs to be accessible to reactant molecules.…”
Section: Resultsmentioning
confidence: 99%
“…The film thickness can be precisely controlled, allowing for the optimization of the interface between the metal particles and the coating [22]. In our previous work, Pt nanoparticles were easily deposited on an inert CNT surface using O3 as the reactant gas and MeCpPtMe3 as the Pt precursor [23,24], and porous N-doped carbon nanofilms were obtained by pyrolyzing PI films deposited by molecular layer deposition (MLD) [25].…”
Section: Introductionmentioning
confidence: 99%