2011
DOI: 10.1063/1.3645620
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Undoped and in-situ B doped GeSn epitaxial growth on Ge by atmospheric pressure-chemical vapor deposition

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Cited by 194 publications
(162 citation statements)
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“…The GeSn layer is in-situ doped by adding B 2 H 6 to the Ge 2 H 6 and SnCl 4 precursors with a Boron target concentration of 3 × 10 18 cm −3 . This target value is experimentally confirmed by secondary ion mass spectroscopy (SIMS) measurements and, although B activation has not been measured on this specific sample, 100% B activation has been reported for similar GeSn layers [15]. According to (224) reciprocal space mappings (RSM) obtained from X-ray diffraction (XRD) measurements, the GeSn strain relaxation level is 43%.…”
Section: Devicessupporting
confidence: 49%
See 1 more Smart Citation
“…The GeSn layer is in-situ doped by adding B 2 H 6 to the Ge 2 H 6 and SnCl 4 precursors with a Boron target concentration of 3 × 10 18 cm −3 . This target value is experimentally confirmed by secondary ion mass spectroscopy (SIMS) measurements and, although B activation has not been measured on this specific sample, 100% B activation has been reported for similar GeSn layers [15]. According to (224) reciprocal space mappings (RSM) obtained from X-ray diffraction (XRD) measurements, the GeSn strain relaxation level is 43%.…”
Section: Devicessupporting
confidence: 49%
“…A 200 nm thick Boron doped p+ GeSn layer was grown on top of a 4 , 450µm thick, Ge substrate by chemical vapor deposition (CVD) at 320 • C [15,16]. Blanket n-doped Ge(100) wafers with low (∼ 10 16 cm −3 ) carrier concentration were used as substrates.…”
Section: Devicesmentioning
confidence: 99%
“…However, the nature of the strain is not that expected from uniform uniaxial expansion which would be expected to give rise to a series of well-defined secondary peaks (fringes) to the low angle side of the ð400Þ Bragg peak. 37,38 For ion-synthesised samples, the strain is nonuniform along the depth of the GeSn layer, which originates from a non-uniform Sn distribution due to the implanted Sn profile and the Sn redistribution during PLM. This leads to a broad GeSn Bragg peak and washed out fringes.…”
Section: A Structural Propertiesmentioning
confidence: 99%
“…In the remaining v-Ge, Sn diffusion due to residual temperature gradient after each of the 100 laser pulses is observed. 5,17 Slight increase of signal intensity at the v-Ge/Si interfaces can also be attributed to matrix effects caused by changing crystal lattice.…”
mentioning
confidence: 99%
“…1,2 Due to the extreme low solubility of Sn in Ge (<1%), 3 great efforts were directed to optimize the growth of such alloys with conventional techniques like chemical vapor deposition (CVD) and molecular beam epitaxy (MBE) by tuning the deposition parameters for a non-equilibrium epitaxial growth. [4][5][6][7][8] In the past, also alternative techniques involving laser annealing 9-11 were proposed but not further developed.…”
mentioning
confidence: 99%