2022
DOI: 10.3390/nano12234143
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Understanding the Role of Soft X-ray in Charging Solid-Film and Cellular Electrets

Abstract: Solid-film electrets and cellular electrets are defined as promising insulating dielectric materials containing permanent electrostatic and polarizations. High-performance charging methods are critical for electret transducers. Unlike dielectric barrier discharge (DBD) charging, the soft X-ray charging method, with its strong penetration ability, has been widely used in electrets after packaging and has even been embedded in high-aspect-ratio structures (HARSs). However, the related charging model and the char… Show more

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Cited by 3 publications
(2 citation statements)
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References 38 publications
(54 reference statements)
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“…The minimum dynamic pull‐in surface potential, which is determined by the maximum external excitation, is the charging limit of the electret film, which should not be exceeded to prevent HPEVEH from the pull‐in phenomenon. Moreover, according to Paschen's law, the surface potentials of electret initiating the breakdown of the 0.5 mm air gap and 1.0 mm air gap are approximately −2500 and −3400 V, which also are the charging limits of the electret film [26].…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…The minimum dynamic pull‐in surface potential, which is determined by the maximum external excitation, is the charging limit of the electret film, which should not be exceeded to prevent HPEVEH from the pull‐in phenomenon. Moreover, according to Paschen's law, the surface potentials of electret initiating the breakdown of the 0.5 mm air gap and 1.0 mm air gap are approximately −2500 and −3400 V, which also are the charging limits of the electret film [26].…”
Section: Resultsmentioning
confidence: 99%
“…Owing to its high dielectric strength and high surface charge density, polytetrafluoroethylene is chosen for the electret material and is glued onto the substrate with conductive copper tape. The electret film was charged using the 10 keV soft X-ray, which has strong penetration ability through the piezoelectric cantilever and achieve the polarisation of electret after package [25,26]. In practice, a high voltage is applied to the back electrode of the electret film, and the surface potential of electret can be in situ changed by adjusting the high voltage.…”
Section: Property Valuementioning
confidence: 99%