2018
DOI: 10.1186/s11671-018-2546-x
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Understanding the Growth Mechanism of GaN Epitaxial Layers on Mechanically Exfoliated Graphite

Abstract: The growth mechanism of GaN epitaxial layers on mechanically exfoliated graphite is explained in detail based on classic nucleation theory. The number of defects on the graphite surface can be increased via O-plasma treatment, leading to increased nucleation density on the graphite surface. The addition of elemental Al can effectively improve the nucleation rate, which can promote the formation of dense nucleation layers and the lateral growth of GaN epitaxial layers. The surface morphologies of the nucleation… Show more

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Cited by 20 publications
(14 citation statements)
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“…3 c), the 3D islands became larger, resulting in coalescence of islands. This tends to transform the GaN from 3D islands to quasi 2D films 39 . However, in respect of precursor-to-substrate distance, only marginal variations in the morphology of GaN films were noticed (Fig.…”
Section: Resultsmentioning
confidence: 99%
“…3 c), the 3D islands became larger, resulting in coalescence of islands. This tends to transform the GaN from 3D islands to quasi 2D films 39 . However, in respect of precursor-to-substrate distance, only marginal variations in the morphology of GaN films were noticed (Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Generally, direct epitaxial deposition can be divided into three steps: 1) mono-oriented nucleation, 2) grain enlargement, and 3) formation of highly oriented continuous film. [21,[23][24][25] The epitaxial growth process has a strict requirement not only on the growth atmosphere, but also on the substrate. Well-designed MOCVD, PLD, and MBE systems could provide a precisely controlled atmosphere, but the highly oriented film can only be grown on single-crystal substrates with minor lattice mismatch.…”
mentioning
confidence: 99%
“…From the perspective of crystal growth, stronger catalytic effect is equivalent to smaller nucleation activation energy. The nucleation activation energy E a is expressed as [48,49]:…”
mentioning
confidence: 99%