Understanding the electron-stimulated surface reactions of organometallic complexes to enable design of precursors for electron beam-induced deposition

Mechanism-based design of precursors for focused electron beam-induced deposition

“…The reactions of W(CO) 6 and Pt(PF 3 ) 4 reflect a sequential, two-step reaction sequence [38,44,45] observed for several FEBID precursors that bear monodentate ligands: precursor decomposition accompanied by ligand desorption [Eq. (1)] followed by decomposition of the remaining ligands [Eq.…”

“…The organic contamination in FEBID nanostructures is a consequence of the second step of the reaction process, which is characterized by ligand decomposition, where ML n indicates a precursor composed of a metal (M ) and ligands (L), and Z (g) represents volatile fragments desorbed. [45] ML n(abs) + e − ML y(ads)…”

“…8(b)] have drawn significant interest within the FEBID community, both Au(I) precursors suffer from moisture sensitivity [70,72,73] and thermal instability. [73][74][75] These compounds decompose at relatively low temperatures (RT for L = CO, 40-45°C for L = PF 3 ) [45,74,76] making storage and scale-up problematic for…”

“…(8) and (9). [45] Initially, the adsorbed precursor is exposed to the electrons whereupon the neutral L ligand desorbs from the surface forming gaseous L while an X-Au motif remains adsorbed on the surface. Subsequently, the anionic X ligand is ejected into the gas phase upon further irradiation of the partially decomposed X-Au species, resulting in a pure gold deposit.…”

Sub-10 nm writing: focused electron beam-induced deposition in perspective

“…Steps forward have been made with the appropriate selection of precursors and writing conditions [31,32], and the rational precursor design for FEBIP receives increasing attention. Experimental work is combined with theoretical calculations [33,34], novel precursors (e.g., for gold deposition) are tested [31], and rational design rules based on fundamental dissociation studies are formulated [35,36].…”