Understanding spatial resolution of laser voltage imaging

Ravikumar, Venkat Krishnan; Lim, Gina; Chin, J.M.; Pey, K. L.; Yang, Joel K. W.

doi:10.1016/j.microrel.2018.07.051

Cited by 14 publications

(2 citation statements)

References 3 publications

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“…Since the test vectors change with time, the timing map can be construed as a three-dimensional matrix, with the third dimension representing time. A piecewise multiplication of the modulation map with the timing map is a time-varying three-dimensional matrix called the modulation capacity (MC) 33 and is described in Eq. 5 .…”

Section: Methodsmentioning

confidence: 99%

Super-resolution laser probing of integrated circuits using algorithmic methods

Ravikumar

Chin²,

Lua³

et al. 2022

Nat Commun

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Laser probing remains invaluable to the semiconductor industry for isolating and diagnosing defects in silicon transistors in integrated circuits during electrical stress tests. However, continuous device miniaturization below the 20 nm technology node has crammed multiple transistors within the focal spot of the laser beam, resulting in signal crosstalk, poor beam positioning accuracy and degraded fault isolation capabilities. The challenge is analogous to focusing attention to a single speaker in a crowd despite the multiple simultaneous conversations in the background. Through algorithms introduced in this patented work, consisting of cross-correlations, clustering, and our previously developed combinational logic analysis, we achieved beam positioning accuracy to better than 10 nm, extracted electrooptic waveforms from a node of a group of transistors (~18 times beyond the optical resolution limit), and applied this to isolate and identify an actual fault on a defective device. While problems associated with probing with shorter wavelength lasers continue to be addressed, our approach enhances and enables the continued probing of ICs using sub-bandgap photon energies without hardware modification to existing technology at semiconductor technology nodes below 10 nm.

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Section: Methodsmentioning

confidence: 99%

Super-resolution laser probing of integrated circuits using algorithmic methods

Ravikumar

Chin²,

Lua³

et al. 2022

Nat Commun

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“…The diffraction limited spot size depends on the NA of the objective and the beam characteristics (Equation 2.7). For confocal laser scanning systems it is useful to assume an Airy disc, describing its intensity profile in terms of a Gaussian distribution, which changes the resolution coefficient from 0.5 to 0.87 [21].…”

Section: Differential Interference Contrast Microscopymentioning

confidence: 99%

Revitalization of a multimodal microscope for biological imaging applications

Pelepchan¹

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The goal of this engineering thesis was to restore and upgrade a legacy electro-optical microscopy system for use in experimental research. This was accomplished through the application of a broad range of engineering disciplines and problem solving skills. The operation of the legacy system was assessed as a whole, and the performance of each component was characterized and compared to the design requirements. Malfunctioning technology was repaired, when possible, and new devices and software were implemented to enhance the capabilities of the original design. The resulting imaging system is capable of producing data on par with the legacy system and serves as a base for implementing additional microscopy techniques and future upgrades.

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