Uncooled antenna‐coupled terahertz thermal detector using CMOS process

Abstract

This article presents an uncooled monolithic resonant terahertz (THz) thermal detector using a standard 55 nm CMOS process without any postprocessing procedures. The detector is composed of a resonant loop antenna loaded with a polysilicon resistor and a proportional to absolute temperature (PTAT) sensor which is used as a temperature sensitive device. The basic operation principle, overall design considerations and relatively better measurement results are demonstrated. A maximum responsivity of 30.6 V/W and a minimum noise equivalent power (NEP) of 1.68 μW Hz for the thermal detector are measured at the operating frequency of 910 GHz.

Responsivity enhancement techniques for CMOS source‐driven terahertz detectors

“…Several different types of THz detectors have been developed over time. 6,7 THz detectors can be divided into three types based on their detection principles: photon type, 8 thermal radiation type, 9,10 and electronic type. Compared with the other detectors, electronic detectors are more concerned because of its stronger real-time performance and easier arrayed properties.…”