2005
DOI: 10.1117/12.624670
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Uncooled 160×120 microbolometer IR FPA based on sol-gel VO x

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Cited by 7 publications
(6 citation statements)
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“…The vanadium oxide microbolometer array was initially developed for imaging midinfrared (MIR) radiation [19] and then adapted to the terahertz region [20]. In the first experiments we used a 160 × 120 array with a germanium window and a 51-μm pixel size.…”
Section: Microbolometer Arraymentioning
confidence: 99%
“…The vanadium oxide microbolometer array was initially developed for imaging midinfrared (MIR) radiation [19] and then adapted to the terahertz region [20]. In the first experiments we used a 160 × 120 array with a germanium window and a 51-μm pixel size.…”
Section: Microbolometer Arraymentioning
confidence: 99%
“…A small array size (128 × 128 elements) limits the applicability of the thermal recorder in terahertz imaging, but a high repetition rate (up to 50 Hz) enables employment of the device in laser beam tracing. An uncooled 160 × 120 vanadium oxide microbolometer focal plane array (FPA) with a germanium window and physical dimensions of 8.2 × 6.1 mm 2 , initially developed by Rzhanov Institute of Semiconductor Physics for detection of mid-IR radiation [32], was adapted to imaging of terahertz radiation [28]. Since the FPA is sensitive directly to terahertz radiation, it turned out to be one of the best terahertz imagers.…”
Section: Thz Beam Detection and Imagingmentioning
confidence: 99%
“…Vanadium oxide 160×120 pixel matrix was designed for the operation in the middle infrared spectral region (8 -14 µm). The fabrication technology and operational characteristics of the matrix in this spectral region are described in paper [3]. In this paper we describe the application of this matrix for the recording of the monochromatic radiation in the spectral range 130 -150 µm.…”
Section: Matrix Descriptionmentioning
confidence: 99%