Uncertainty and dimensional calibrations

Doiron, Theodore D.; Stoup, John R.

doi:10.6028/jres.102.044

Cited by 37 publications

(26 citation statements)

References 14 publications

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“…Thus accuracy is severely degraded by such effects as wavelength drift in the laser cavity, and by air turbulence, air pressure, temperature, and humidity variations in the interferometer arms, all which cause refractive index drift and thus wavelength variations. Variable beam paths also compromise accuracy in a number of ways due to diffraction, position-dependant wavefront distortion, and Abbe and cosine errors [22][23][24][25][26]. The reticle (mask) is imaged onto the substrate using reduction optics.…”

Section: 2mentioning

confidence: 99%

<title>The critical role of metrology in nanotechnology</title>

Schattenburg¹,

Smith²

2002

SPIE Proceedings

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The nascent nanotechnology revolution promises many benefits to humankind. An exciting and sometimes bewildering variety of new nanofabrication technologies and nanodevices based on electrical, optical, magnetic, mechanical, chemical and biological effects are reported almost daily. It is prudent to ask, however, how many of these breakthroughs will remain laboratory curiosities and how many will proceed to widespread industrialization. We argue that a metrology infrastructure has underpinned all industrial revolutions, and that this infrastructure is weak or nonexistent for many of the proposed nanosystems. More attention needs to be paid to metrology or progress will be derailed in a number of areas.

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Section: 2mentioning

confidence: 99%

<title>The critical role of metrology in nanotechnology</title>

Schattenburg¹,

Smith²

2002

SPIE Proceedings

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“…(1) The length of a gauge at temperature offset 0 is given by l{9} = 1(1 + ciO) (2) where I is the length at the reference temperature, and c is the thermal expansion coefficient for the gauge material. In our example, the manufacturer of the steel working standard gauge blocks gives .…”

Section: Mathematical Model Of the Measurementmentioning

confidence: 99%

<title>Uncertainty of gauge block calibration by mechanical comparison: a worked example for gauge blocks of dissimilar materials</title>

Decker

Ulrich²,

Pekelsky

1998

SPIE Proceedings

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The definition of gauge block length, and the lowest-uncertainty gauge block calibrations, derive their link to the definition of the metre through the technique of optical interferometry using calibrated optical wavelengths. Following interferometric calibration of gauge blocks, the technique of mechanical comparison of gauge blocks is largely used for the dissemination of the metre. A measurement scenario for the case of low-uncertainty gauge block calibration in which the working standard and client gauge blocks are made of dissimilar materials is described. The correction for stylus deformation is determined experimentally. A detailed tutorial on evaluating the uncertainties for this gauge block calibration in accordance with the ISO Guide to the expression of uncertainty in measurement is reported, including discussion of degrees of freedom and correlations.

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“…For decades the refractive index of air has been estimated using empirical equations relating refractive index to pressure, temperature, humidity, and carbon dioxide content [1][2][3][4][5], but even the most precise measurements of these environmental conditions (that is, employing a weather station) will give an estimate of refractive index no better than a few parts in 10 8 . In practice, uncertainty in the refractive index of air often contributes a yet larger uncertainty to the highest accuracy airbased displacement measurements [6] and dimensional calibrations [7,8].…”

Section: Introductionmentioning

confidence: 99%

Absolute refractometry of dry gas to ±3 parts in 10^9

Egan

Stone

2011

Appl. Opt.

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We present a method of measuring the refractive index of dry gases absolutely at 632.8 nm wavelength using a Fabry-Perot cavity with an expanded uncertainty of <3×10⁻⁹ (coverage factor k=2). The main contribution to this uncertainty is how well vacuum-to-atmosphere compression effects (physical length variation) in the cavities can be corrected. This paper describes the technique and reports reference values for the refractive indices of nitrogen and argon gases at 100 kPa and 20 °C with an expanded uncertainty of <9×10⁻⁹ (coverage factor k=2), with the additional and larger part of this uncertainty coming from the pressure and temperature measurement.

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Uncertainty and dimensional calibrations

Cited by 37 publications

References 14 publications

<title>The critical role of metrology in nanotechnology</title>

<title>The critical role of metrology in nanotechnology</title>

<title>Uncertainty of gauge block calibration by mechanical comparison: a worked example for gauge blocks of dissimilar materials</title>

Absolute refractometry of dry gas to ±3 parts in 10^9

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