Un-Cooled Microbolometers with Amorphous Germanium-Silicon (a-GexSiy:H) Thermo-Sensing Films

Moreno, Mario; Torres, Alfonso; Ambrosio, Roberto; Kosarev, A.

doi:10.5772/32222

Cited by 7 publications

(8 citation statements)

References 18 publications

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“…For good performance, responsivity should be as high as possible. For non-modulated radiation, the voltage responsivity is [9]:

Rv = \frac{ε β I_{b} α R_{b}}{G}

where ε is the optical absorption coefficient, β is the fill factor, I b is the bias current, α is the TCR, R b is the electrical resistance of the microbolometer, and G is the effective thermal conductance.…”

Section: Discussion Of Protein Microbolometer Performancementioning

confidence: 99%

“…Sources of interference are conduction, convection, and radiation. When microbolometers are encapsulated in an evacuated vacuum package with an IR transmitting window, convection and radiation mechanism are minimized, and can be neglected [9]. Conduction dominates the system, so both one-level and two-level types must have a supporting structure to inhibit the conduction mechanism.…”

Section: Introductionmentioning

confidence: 99%

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Using an SU-8 Photoresist Structure and Cytochrome C Thin Film Sensing Material for a Microbolometer

Lai

Liao

2012

Sensors

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There are two critical parameters for microbolometers: the temperature coefficient of resistance (TCR) of the sensing material, and the thermal conductance of the insulation structure. Cytochrome c protein, having a high TCR, is a good candidate for infrared detection. We can use SU-8 photoresist for the thermal insulation structure, given its low thermal conductance. In this study, we designed a platform structure based on a SU-8 photoresist. We fabricated an infrared sensing pixel and recorded a high TCR for this new structure. The SU-8 photoresist insulation structure was fabricated using the exposure dose method. We experimentally demonstrated high values of TCR from 22%/K to 25.7%/K, and the measured noise was 1.2 × 10−8 V2/Hz at 60 Hz. When the bias current was 2 μA, the calculated voltage responsivity was 1.16 × 105 V/W. This study presents a new kind of microbolometer based on cytochrome c protein on top of an SU-8 photoresist platform that does not require expensive vacuum deposition equipment.

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“…For good performance, responsivity should be as high as possible. For non-modulated radiation, the voltage responsivity is [9]:

Rv = \frac{ε β I_{b} α R_{b}}{G}

Section: Discussion Of Protein Microbolometer Performancementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Using an SU-8 Photoresist Structure and Cytochrome C Thin Film Sensing Material for a Microbolometer

Lai

Liao

2012

Sensors

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“…Additionally, this solution guarantees low thermal capacitance of the entire sensor structure and consequently quick response times. Moreover, when the membrane is suspended at the height of a few of microns, it forms with the substrate a resonant cavity reflecting radiation back from the wafer towards the sensor and consequently further increasing its sensitivity [5]- [6].…”

Section: Microbolometersmentioning

confidence: 99%

Compact thermal modeling of microbolometers

Janicki

Zając

Szermer

et al. 2014

2014 15th International Conference on Thermal, Mechanical and Mulit-Physics Simulation and Experiments in Microelectronics and

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This paper presents an approach to dynamic thermal modeling of micromachined microbolometers. Firstly, all the important factors influencing temperature of infrared radiation sensing elements are identified in repeated numerical thermal simulations performed for a detailed device model, where temperature values were computed for time instants equidistantly spaced on the logarithmic time scale. Secondly, based on the simulation results all the important time constants contained in these dynamic thermal responses were properly identified what allowed the derivation of compact thermal models in the form RC equivalent circuits containing a limited number of stages. The resulting compact thermal models are suitable for the direct implementation in SPICE or any other multiphysics simulation environment.

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“…Compared to a-Si:H, it has a higher TCR of 4.3 %/K and lower resistance. 20 Aside from these traditional 3D materials, carbon nanotubes (with a TCR of 0.3 %/K) and the 2D material graphene (with a TCR of 4-11 %/K) have been applied in bolometers, 21,22 although the fabrication is more challenging. Enhancing the absorbing efficiency is another way to improve the bolometer performance.…”

Section: Introductionmentioning

confidence: 99%

Mid-Infrared Nanometallic Antenna Assisted Silicon Waveguide Based Bolometers

Wu¹,

Qu²,

Osman³

et al. 2019

ACS Photonics

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The mid-infrared (MIR) wavelength region is attracting more and more research for applications such as medical diagnostics, environmental monitoring, and free space communications. In the MIR, thermal detectors play an important role because they can operate over a large wavelength range, can be fabricated using CMOS compatible processes, and do not require cooling. Today no other MIR detector technology is able to fill this gap. We demonstrate the first uncooled silicon waveguidebased bolometers, in the Silicon-on-Insulator (SOI) and suspended silicon waveguide platforms. The bolometers comprise gold plasmonic antennas on the waveguide surface that heat up when they absorb light, and amorphous silicon thermometers (formed by ion implantation), whose electrical resistance changes by 0.90 ± 0.26 % K −1 when they are heated. We show that suspending the bolometers improves their performance, and achieve sensitivities of up to 1.13 ± 0.04% change in resistance per milliwatt of input power, with a noise equivalent power of 66 µW/ √ Hz. Calculations suggest the NEP could in future, be further reduced by 4 orders of magnitude.

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Un-Cooled Microbolometers with Amorphous Germanium-Silicon (a-GexSiy:H) Thermo-Sensing Films

Cited by 7 publications

References 18 publications

Using an SU-8 Photoresist Structure and Cytochrome C Thin Film Sensing Material for a Microbolometer

Using an SU-8 Photoresist Structure and Cytochrome C Thin Film Sensing Material for a Microbolometer

Compact thermal modeling of microbolometers

Mid-Infrared Nanometallic Antenna Assisted Silicon Waveguide Based Bolometers

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