International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138)
DOI: 10.1109/iedm.2000.904417
|View full text |Cite
|
Sign up to set email alerts
|

Ultraviolet avalanche photodiode in CMOS technology

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3

Citation Types

0
20
0

Publication Types

Select...
7
1

Relationship

0
8

Authors

Journals

citations
Cited by 20 publications
(20 citation statements)
references
References 10 publications
0
20
0
Order By: Relevance
“…An avalanche photodiode integrated in a CMOS process used a modulation-doped n-well to avoid edge breakdown at the reverse bias of about 20 V [3]. In the standard CMOS process used, the avalanche photodiodes (APD) had a rather moderate responsivity of about 4.6A/W at 430 nm [3]. Another disadvantage of that in [3] is that a reverse bias of 19.5 V was necessary.…”
mentioning
confidence: 99%
“…An avalanche photodiode integrated in a CMOS process used a modulation-doped n-well to avoid edge breakdown at the reverse bias of about 20 V [3]. In the standard CMOS process used, the avalanche photodiodes (APD) had a rather moderate responsivity of about 4.6A/W at 430 nm [3]. Another disadvantage of that in [3] is that a reverse bias of 19.5 V was necessary.…”
mentioning
confidence: 99%
“…The gain-bandwidth Manuscript product of 280 GHz was achieved [13]. The other possible application of the CMOS-APD is Blu-ray systems [15]- [17]. In Blu-ray systems, a laser diode emitting at 400 nm wavelength range is used as a light source, and a quadrant Si PIN photodiode (PIN-PD) is used for photodetection as shown in Fig.…”
Section: Introductionmentioning
confidence: 99%
“…Since the data rate for 1× readout speed is 36 Mbps, 12× readout speed, for example, is 432 Mbps, which requires at least 200 MHz bandwidth for photodiodes. In [15], avalanche photodiodes were fabricated and were characterized in 300 ∼ 1000 nm wavelength range. At 430 nm wavelength, the responsivity is 0.18 A/W at zero bias voltage and is increased to 4.6 A/W at 19.1 V bias voltage due to avalanche amplification, which corresponds to the avalanche gain of about 25.…”
Section: Introductionmentioning
confidence: 99%
“…Consequently, it becomes very difficult to collect the photogenerated carriers across silicon devices and thus to generate electrical energy under UV illumination. A variety of approaches have been investigated to enhance the responsivity of silicon in UV, e.g., by using shallower junctions in avalanche photodiode architecture [6].…”
Section: Introductionmentioning
confidence: 99%