1999
DOI: 10.4028/www.scientific.net/ssp.67-68.229
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Ultrathin Quasi-Monocrystalline Silicon Films for Electronic Devices

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Cited by 33 publications
(24 citation statements)
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“…The enhanced optical absorption in thin silicon with nanovoids has already been reported experimentally [1][2][3][4] and also theoretically [1,5,6]. However, little work has been done on the electrical behaviour of thin silicon layers with nanovoids, though there has been reported work on computing the effective carrier density of other materials [7,8].…”
Section: Introductionmentioning
confidence: 89%
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“…The enhanced optical absorption in thin silicon with nanovoids has already been reported experimentally [1][2][3][4] and also theoretically [1,5,6]. However, little work has been done on the electrical behaviour of thin silicon layers with nanovoids, though there has been reported work on computing the effective carrier density of other materials [7,8].…”
Section: Introductionmentioning
confidence: 89%
“…A sudden increase of the current density to a moderately high value (∼60-100 mA cm −2 ) for a few seconds creates a very thin (sub-µm) buried layer of higher porosity ( 50%) between the thick low porosity layer and the substrate. The double porous layer is finally annealed at high temperature from 900 to 1100 • C for times between 30 and 120 min in high vacuum [2,3] or hydrogen ambient [9][10][11]. The low porosity layer is then transformed into a monocrystalline layer termed QMS [2,3] or QMPS [5,6] that can itself act as a device layer or may be used as a seed layer for growing a silicon epitaxy layer over it.…”
Section: Fabrication Of the Qmps Layer And Its Propertiesmentioning
confidence: 99%
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