Ultrathin MEMS thermoelectric generator with Bi2Te3/(Pt, Au) multilayers and Sb2Te3 legs

Abstract

Multilayer structure is one of the research focuses of thermoelectric (TE) material in recent years. In this work, n-type 800 nm Bi 2 Te 3 /(Pt, Au) multilayers are designed with p-type Sb 2 Te 3 legs to fabricate ultrathin microelectromechanical systems (MEMS) TE devices. The power factor of the annealed Bi 2 Te 3 /Pt multilayer reaches 46.5 μW cm −1 K −2 at 303 K, which corresponds to more than a 350% enhancement when compared to pristine Bi 2 Te 3 . The annealed Bi 2 Te 3 /Au multilayers have a lower power factor than pristine Bi 2 Te 3 . The power of the device with Sb 2 Te 3 and Bi 2 Te 3 /Pt multilayers measures 20.9 nW at 463 K and the calculated maximum output power reaches 10.5 nW, which is 39.5% higher than the device based on Sb 2 Te 3 and Bi 2 Te 3 , and 96.7% higher than the Sb 2 Te 3 and Bi 2 Te 3 /Au multilayers one. This work can provide an opportunity to improve TE properties by using multilayer structures and novel ultrathin MEMS TE devices in a wide variety of applications.

Storing energy with molecular photoisomers

“…134 Another coupled MOST device was recently used to generate electricity. By combining a microelectromechanical-systems-based thermoelectric generator (MEMS-TEG) [135][136][137] with a NBD derivarive 36 (in solution) (Figure 7C) or an AZO derivative 62 (neat coating) (Figure 7D), the hybrid device illustrates a proof-of-principle functional solar-electrical battery. Such integrated devices were able to continuously generate power densities of up to 1.3 W m À3 , showing that, on a small scale, opportunities exist for local solar energy storage and power production beyond traditional photovoltaic-electrochemical cell technologies.…”

Thermoelectric properties of CZTS thin films: effect of Cu–Zn disorder

“…Therefore, two key-points can be underlined: i) the Cu-Zn disorder can be indicative of poor quality of the as-grown absorber in photovoltaic devices, thus making it essential to be identified, quantified and understood and ii) this same disorder might instead be exploited in other applications such as thermoelectricity 17,18,25 and tunable electronics [26][27][28] , pointing to attractive directions for micro power generation 29,30 and sensing 31 , as well as micro-electro-mechanical systems (MEMS) 32 .…”

Perspective— Powerful Micro/Nano-Scale Heat Engine: Thermoelectric Converter on Chip

“…can be fabricated into micro-thermoelectric devices in combination with MEMS technology. 4,[11][12][13] The integration challenge of up to tens of thousands of thermoelectric thin-film couples with a thickness of ∼1 μm has been achieved. 14 Generally, thermoelement with a long length is favorable for establishing large temperature differentials to achieve high conversion efficiencies.…”