Ultrathin Membranes for Gas Separation

Ultrahigh permeance metal coated porous graphene membranes with tunable gas selectivities

“…It has been shown that vast permeances in the range of $10 6 -10 7 GPU (1 gas permeation unit = 3.35 3 10 À10 mol$m À2 $s À1 $Pa À1 ) can be achieved with a membrane based on porous double-layer graphene, 17 albeit with low gas selectivities. [17][18][19][20][21][22][23][24][25][26][27][28][29] Accordingly, we identified porous double-layer graphene as the high permeance support layer for our adsorptive membrane (Figure 1B). Specifically, we transferred a double-layer graphene onto a holey silicon nitride (SiN x ) substrate (with a 20 3 20 array of $650 nm diameter pores) using a facile, photoresist-based method (Figure S1), which offers clean, defect-free, and high-quality graphene transfer in good yields (Figure S2).…”