A stable n-type semiconductor material, ZnPcF 16 , was synthesized and characterized by infrared (IR), UV-vis and uorescence spectra. ZnPcF 16 showed a monomer characteristic in 1, 2-dichlorobenzene (DCB) while exhibited an aggregation property in tetrahydrofuran (THF) and dimethylformamide (DMF). The ZnPcF 16 /p-6p (ZnPcF 16 on p-6p) organic thin lm transistors (OTFTs) using ZnPcF 16 as an active layer and p-6p as an inducing layer was fabricated by the physical vapor deposition technique. The ZnPcF 16 semiconductor lm was characterized by XRD and SEM. And the results showed that ZnPcF 16 molecules can be oriented after the employment of the p-6p inducing layer. Charge carrier eld-effect mobility (µ) and threshold voltage (V T ) of the ZnPcF 16 /p-6p OTFTs were 1.3 × 10 −2 cm 2 /V s and 22 V, respectively.