2005
DOI: 10.1016/j.surfcoat.2005.02.064
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Ultrathin carbon–fluorine film processing

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Cited by 16 publications
(13 citation statements)
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“…Hence, the properties of nanoscaled coatings are affected, as well as adhesion and roughness (83). Hence, the formation of film-forming species (plasma-chemical reaction pathway) is not altered.…”
Section: Influence Of Polymers On the Plasma Conditionsmentioning
confidence: 99%
“…Hence, the properties of nanoscaled coatings are affected, as well as adhesion and roughness (83). Hence, the formation of film-forming species (plasma-chemical reaction pathway) is not altered.…”
Section: Influence Of Polymers On the Plasma Conditionsmentioning
confidence: 99%
“…Using a plasma-enhanced chemical vapour deposition (PECVD) process, the mechanical and usually also the optical properties of the native polymer materials remain unaltered. Though, by varying the plasma parameters during PECVD, coatings with many different functionalities like barrier, protective or anti-adhesive coatings can be prepared without causing negative effects on the basic packaging functions [36][37][38]. In this study the focus is on functional layers on a nanometer scale prepared by PECVD.…”
Section: Possible Solution Approachesmentioning
confidence: 99%
“…The plasma‐polymerized fluoroform (pp‐CHF 3 ) films were deposited in a pulsed Ar/CHF 3 plasma (25 sccm Ar, 3.6 sccm CHF 3 ) with a duty cycle (dc) of 0.13 ( t on = 30 ms, t off = 200 ms) at 20 W for 30 s 20…”
Section: Experimental Partmentioning
confidence: 99%