“…Because of the advantages of ultrasonic measurements such as noninvasiveness and faster response, some works on the application of ultrasound to temperature estimations have been carried out extensively. [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19][20] In the early stages, Degertekin et al 1) carried out temperature measurements of semiconductor wafers using Lamb waves, and Simon et al 2) attempted to fabricate a temperature tomograph using an array sensor. Mizutani and coworkers, 4,14) Kudo and coworkers, 7,9) Huang et al, 6) Tsai et al, 10) Funakoshi et al, 17) and Minamide et al 16) extensively studied on the measurements of temperature distributions in air using multiple sensors.…”