Ultrasonic manometers for low and medium vacua under development at the National Bureau of Standards

Heydemann, Peter L. M.; Tilford, Charles R.; Hyland, R.W.

doi:10.1116/1.569158

Cited by 66 publications

(25 citation statements)

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“…The primary standard used at NIST to characterize piston gauges is a UIM with a full-scale range of 360 kPa. The unique feature of the UIMs developed at NIST [7][8][9][10] is that the change in height of the manometric-fluid surfaces (column heights) is determined by an ultrasonic technique. A transducer at the bottom of each liquid column generates a pulse of ultrasound (typically near 10 MHz) that propagates up the column, is reflected from the liquid-gas interface, and returns to be detected by the transducer.…”

Section: The Ultrasonic Interferometer Manometermentioning

confidence: 99%

Primary pressure standards based on dimensionally characterized piston/cylinder assemblies

et al. 2005

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NIST has characterized two large diameter (35.8 mm) piston/cylinder assemblies as primary pressure standards in the range 0.05 MPa to 1.0 MPa with uncertainties approaching the best mercury manometers. The realizations of the artefacts as primary standards are based on the dimensional characterization of the piston and cylinder, and models of the normal and shear forces on the base and flanks of the piston. We have studied two piston/cylinder assemblies, known at the National Institute of Standards and Technology (NIST) as PG 38 and PG 39, using these methods. The piston and cylinder of both assemblies were accurately dimensioned by Physikalisch Technische Bundesanstalt (PTB). All artefacts appeared to be round within ±30 nm and straight within ±100 nm over a substantial fraction of their heights. PG 39 was dimensioned a second time by PTB, three years after the initial measurement, and showed no significant change in dimensions or effective area. Comparisons of the effective area of PG 38 and PG 39 from dimensional measurements, against those obtained with calibration against the NIST ultrasonic interferometer manometer (UIM), are in agreement within the combined standard (k = 1) uncertainty of the dimensional measurements and the UIM. A cross-float comparison of PG 38 versus PG 39 also agreed with the dimensional characterization within their combined standard uncertainties and with the UIM calibrations. The expanded (k = 2) relative uncertainty of the effective area is about 6.0 × 10 −6 for both assemblies.

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Section: The Ultrasonic Interferometer Manometermentioning

confidence: 99%

Primary pressure standards based on dimensionally characterized piston/cylinder assemblies

et al. 2005

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“…The long-term stability of the transfer standard package was evaluated using equation (8) with the results shown in figure 5. Also shown in the plot are the relative uncertainties due to systematic effects for the NIST UIMs [1][2][3][4][5][6][7][8]. This plot shows that the long-term stability of the transfer standard package will enable an excellent comparison of primary standards.…”

Section: Resultsmentioning

confidence: 99%

Development of a new high-stability transfer standard based on resonant silicon gauges for the range 100 Pa to 130 kPa

Hendricks

Miiller

2007

Metrologia

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The National Institute of Standards and Technology (NIST) has developed a new transfer standard capable of absolute-mode and differential-mode operation in the range 100 Pa to 130 kPa. This newly built transfer standard relies on resonant silicon gauges (RSGs) of the same type used to provide superior long-term calibration stability in NIST piloted international key comparisons CCM.P-K4 and CCM.P-K5, which covered absolute and differential pressure standards pressures up to 1 kPa (Miiller et al 2002 Metrologia 39 Tech. Suppl. 07001 and 07002). The new transfer standard package differs from the previous packages in that it fully covers the atmospheric pressure range (100 Pa to 130 kPa). This was made possible by the addition of a pair of 130 kPa RSGs to complement a pair of 10 kPa RSGs. The RSG transfer standard package has demonstrated good short-term zero stability and pressure resolution, and has demonstrated long-term instability of only a few ppm at 130 kPa, increasing to 0.01% at 100 Pa. The long-term instability is nominally commensurate with that associated with piston gauge standards, which are limited to pressures of nominally 10 kPa and higher. The main advantage of the new package is that it operates easily at lower pressures than piston gauges while still covering the atmospheric pressure range 100 Pa to 130 kPa.

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“…NIST also realizes pressure with a primary standard mercury manometer known as the ultrasonic interferometer manometer (UIM) for pressures up to 360 kPa [ 7 – 10 ]. PG38 and PG39 have been compared numerous times since 1989 to the UIM, serving as check standards to confirm UIM stability and also to confirm the stability of the piston gauges.…”

Section: Primary Standard Gas Piston Gaugesmentioning

confidence: 99%

A gas pressure scale based on primary standard piston gauges

Olson

Driver

Bowers

2010

J. Res. Natl. Inst. Stand. Technol.

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The National Institute of Standards and Technology (NIST) has redefined its gas pressure scale, up to 17 MPa, based on two primary standard piston gauges. The primary standard piston gauges are 35.8 mm in diameter and operate from 20 kPa to 1 MPa. Ten secondary standard piston gauges, two each of five series of the Ruska 2465 type, with successively smaller diameters form the scale extending up to 17 MPa. Six of the piston gauges were directly compared to the primary standards to determine their effective area and expanded ( k = 2) uncertainty. Two piston gauges operating to 7 MPa were compared to the 1.4 MPa gauges, and two piston gauges operating to 17 MPa were compared to the 7 MPa gauges. Distortion in the 7 MPa piston gauges was determined by comparing those gauges to a DH Instruments PG7601 type piston gauge, whose distortion was calculated using elasticity theory. The relative standard uncertainties achieved by the primary standards range from 3.0 × 10 −6 to 3.2 × 10 −6 . The relative standard uncertainty of the secondary standards is as low as 4.2 × 10 −6 at 300 kPa. The effective areas and uncertainties were validated by comparison to standards of other National Metrology Institutes (NMIs). Results show agreement in all cases to better than the expanded ( k = 2) uncertainty of the difference between NIST and the other NMIs, and in most cases to better than the standard ( k = 1) uncertainty of the difference.

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Ultrasonic manometers for low and medium vacua under development at the National Bureau of Standards

Cited by 66 publications

References 0 publications

Primary pressure standards based on dimensionally characterized piston/cylinder assemblies

Primary pressure standards based on dimensionally characterized piston/cylinder assemblies

Development of a new high-stability transfer standard based on resonant silicon gauges for the range 100 Pa to 130 kPa

A gas pressure scale based on primary standard piston gauges

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