2009
DOI: 10.1021/nl8027476
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Ultrasmooth Silver Thin Films Deposited with a Germanium Nucleation Layer

Abstract: We demonstrate an effective method for depositing smooth silver (Ag) films on SiO(2)/Si(100) substrates using a thin seed layer of evaporated germanium (Ge). The deposited Ag films exhibit smaller root-mean-square surface roughness, narrower peak-to-valley surface topological height distribution, smaller grain-size distribution, and smaller sheet resistance in comparison to those of Ag films directly deposited on SiO(2)/Si(100) substrates. Optically thin ( approximately 10-20 nm) Ag films deposited with approx… Show more

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Cited by 284 publications
(177 citation statements)
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“…The thickness of each Ag/SiO 2 layer was controlled at 30 nm 6 5 nm. To improve the surface roughness of these alternating layers, 2-nm-thick Ge layers were inserted between Ag and SiO 2 layers to enhance the wettability between these two materials [37][38][39] . In this experiment, we first deposited one-pair Ag/ SiO 2 layer on top of a 150-nm-thick Al film and fabricated a onedimensional (1D) patterned meta-absorber using focused ion beam (FIB) lithography, as shown in Fig.…”
mentioning
confidence: 99%
“…The thickness of each Ag/SiO 2 layer was controlled at 30 nm 6 5 nm. To improve the surface roughness of these alternating layers, 2-nm-thick Ge layers were inserted between Ag and SiO 2 layers to enhance the wettability between these two materials [37][38][39] . In this experiment, we first deposited one-pair Ag/ SiO 2 layer on top of a 150-nm-thick Al film and fabricated a onedimensional (1D) patterned meta-absorber using focused ion beam (FIB) lithography, as shown in Fig.…”
mentioning
confidence: 99%
“…A 3-nm germanium layer is evaporated as an adhesion layer, and followed by 30 nm gold evaporation. The Ge seed layer reduces the roughness of the gold surface from 3 to 1 nm, similar to the silver results in [5]. Each array contains identical dipole antennas with a 1-ȝm pitch.…”
Section: Optical Antenna Design and Fabricationmentioning
confidence: 89%
“…46,66 Williams et al used a Ge seed layer to achieve a continuous Ag film. 65 Although the Ge deposition on the substrate also caused island growth, the density of the Ge nuclei was much larger and the islands were significantly smaller than those for Ag deposited without a seed layer on the substrate. This surface provided a heterogeneous nucleation site for the deposited Ag atoms.…”
Section: Seed Layermentioning
confidence: 99%