Ultrashort pulse micromachining with the 10-μJ FCPA fiber laser

Bovatsek, Jim; Arai, Alan; Yoshino, Fumiyo; Uehara, Yuzuru

doi:10.1117/12.659451

Cited by 13 publications

(2 citation statements)

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“…While nowadays, much higher feed speeds and repetition rates are typically used, those parameters might have been due to the lack of availability of high repetition USP laser sources. Nevertheless, by 2005, research on glass welding by USP lasers was on the rise, as evident by another patent being filed on this technology by in 2005 IMRA America Inc. [15] and an additional publication by Tamaki et al in 2006 [16].…”

Section: Development Of Usp Based Glass Weldingmentioning

confidence: 99%

A review on glass welding by ultra-short laser pulses

Cvecek

Dehmel

Miyamoto

et al. 2019

Int. J. Extrem. Manuf.

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Glass welding by ultra-short pulsed (USP) lasers is a piece of technology that offers high strength joints with hermetic sealing. The joints are typically formed in glass that is transparent to the laser by exploiting nonlinear absorption effects that occur under extreme conditions. Though the temperature reached during the process is on the order of a few 1000 °C, the heat affected zone (HAZ) is confined to only tens of micrometers. It is this controlled confinement of the HAZ during the joining process that makes this technology so appealing to a multitude of applications because it allows the foregoing of a subsequent tempering step that is typically essential in other glass joining techniques, thus making it possible to effectively join highly heat sensitive components. In this work, we give an overview on the process, development and applications of glass welding by USP lasers.

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Section: Development Of Usp Based Glass Weldingmentioning

confidence: 99%

A review on glass welding by ultra-short laser pulses

Cvecek

Dehmel

Miyamoto

et al. 2019

Int. J. Extrem. Manuf.

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“…It is one of the reason for which excimer lasers (which emit in the near UV part of the spectrum) can provide in some cases very attractive solutions [2,3]. The recent development of high power ultrafast lasers [4] (delivering energetic pulses in the range of few micro-joules with a duration of about one hundred of femtoseconds) has permitted to drastically improve the quality of this micromachining, first by increasing the peak power of the laser tool (typically the giga-watt), second by limiting the diffusion of the deposited energy around the focal point (the duration of the laser pulse is indeed much shorter than the heat diffusion time inside the material) and third by involving highly non linear laser-matter interaction phenomena [5][6][7]. This deterministic character of optical damage produced by femtosecond laser pulses [8,9] can be used to machine patterns whose dimensions are far below the diffraction limit.…”

Section: -Introductionmentioning

confidence: 99%

Localized measurements of optical thickness variations in femtosecond trimmed structures

2008

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Currently, the utilization of high power ultrafast lasers to induce optical changes in structures for the purpose of locally drawing patterns with dimensions inferior to the diffraction limit is well-established and controlled. Using this technique, we aim to modify the refractive index and/or the geometrical parameters of an optical interferential filter composed of successive thin layers. This local optimization will then allow the improvement or tuning of the performances of the optical filters. Thereafter, it is necessary to characterize these local modifications to achieve the final response of the expected filter. In our work, we developed a dedicated optical system, based on Fabry-Perot interferometry, to measure optical thickness, ranging from 10 -3 to 10 -4 , with a high spatial resolution (in the order of 5x5µm). We present here our preliminary results carried out on calibrated test samples.The use of powerful lasers is now well established in the industry to perform marking, cutting, drilling or welding operations on a wide range of materials and parts [1]. The quality of this laser machining is driven by the geometrical characteristics of the focused light beam (the sharpness of the "laser tool") as well as by the heat exchange phenomena between the machined area and the surrounding zone. It is one of the reason for which excimer lasers (which emit in the near UV part of the spectrum) can provide in some cases very attractive solutions [2,3]. The recent development of high power ultrafast lasers [4] (delivering energetic pulses in the range of few micro-joules with a duration of about one hundred of femtoseconds) has permitted to drastically improve the quality of this micromachining, first by increasing the peak power of the laser tool (typically the giga-watt), second by limiting the diffusion of the deposited energy around the focal point (the duration of the laser pulse is indeed much shorter than the heat diffusion time inside the material) and third by involving highly non linear laser-matter interaction phenomena [5][6][7]. This deterministic character of optical damage produced by femtosecond laser pulses [8,9] can be used to machine patterns whose dimensions are far below the diffraction limit.Obviously, the accuracy of this micro-machining is directly connected to the duration and energy stability of the used femtosecond laser pulses [10], but nowadays it seems possible to reach a reproducibility of few nanometers. Moreover, femtosecond laser pulses are also able, at lower fluence levels, to produce a localized change in the refractive index of transparent materials, which can be used to perform a direct laser writing of a waveguide in the bulk of a glass substrate [11][12][13][14] or to develop entirely new photonic device integration and fabrication procedures [15][16][17]. Besides, standard Nd:YAG lasers are today widely used in the semiconductors industry to adjust (or trim) thin film resistors or thin film capacitors to very tight electrical performance specifications [18,19], and to co...

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Stimulated Brillouin scattering phenomena in a nanosecond linearly polarized Yb-doped double-clad fiber amplifier

Ye¹,

Yan²,

Huang³

et al. 2007

Laser Phys. Lett.

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A comprehensive observation of the stimulated Brillouin scattering (SBS) phenomena in a high power nanosecond linearly polarized Yb-doped double-clad fiber amplifier is presented. According to the behavior of SBS, the amplification process is divided into four regions. All the temporal, spectral and power characteristics of SBS in both forward and backward directions in each region are described in detail. Cascaded SBS with up to 30 orders of Stokes waves and 10 orders of anti-Stokes waves is observed. The fiber damage caused by the giant SBS pulses is reported. And the influence of the linewidth, pulse duration, feedback and polarization on SBS is discussed.

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Ultrashort pulse micromachining with the 10-μJ FCPA fiber laser

Cited by 13 publications

References 0 publications

A review on glass welding by ultra-short laser pulses

A review on glass welding by ultra-short laser pulses

Localized measurements of optical thickness variations in femtosecond trimmed structures

Stimulated Brillouin scattering phenomena in a nanosecond linearly polarized Yb-doped double-clad fiber amplifier

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