Ultrasensitive thermometer for atmospheric pressure operation based on a micromechanical resonator

Cagliani, Alberto; Pini, Valerio; Tamayo, Javier; Calleja, Montserrat; Davis, Zachary

doi:10.1016/j.snb.2014.05.076

Cited by 7 publications

(7 citation statements)

References 32 publications

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“…A wide range of sensing applications have emerged for microelectromechanical system (MEMS) resonators including temperature [1], pressure [2], and particulate mass sensing [3]- [5]. Some applications, such as mass sensing, require the adsorption of material onto the resonator surface which inherently limits the lifetime of the sensor.…”

Section: Introductionmentioning

confidence: 99%

Extending the Lifetime of Resonant Atmospheric Particulate Mass Sensors With Solvent Rinses

et al. 2017

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The cleaning of a collection-based sensor extends its lifetime and reduces its effective cost. Existing cleaning regimes for silicon-based devices typically require access to large laboratory equipment. A simple cleaning method based on solvent rinses is presented here for the application of microresonator atmospheric particulate mass sensors. The suggested approach is intended for scenarios with limited access to laboratory equipment. Two piezoelectric resonator topologies (in-plane bulk mode and out-of-plane flexural) collected particles via impaction for an hour before rinsing. The solvent rinses reset the resonant frequency and quality factor of each resonator to within 0.4% and 10% of their original values, respectively. Subsequent mass collections were largely repeatable despite fluctuations in particle concentration and deposition location. The presented method provides a straightforward but effective cleaning method for soluble particulate removal. A physical cleaning method is required after substantial insoluble particle adsorption.

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Section: Introductionmentioning

confidence: 99%

Extending the Lifetime of Resonant Atmospheric Particulate Mass Sensors With Solvent Rinses

et al. 2017

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“…3c. This value implies that the simple SMP resonant sensor architecture offers temperature detection sensitivity comparable or better than the performances of the state-of-the-art resonant temperature sensors 45,46 or photonic temperature sensors with far more complex structures 48,49 .…”

Section: Resultsmentioning

confidence: 98%

Shape memory polymer resonators as highly sensitive uncooled infrared detectors

et al. 2019

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Uncooled infrared detectors have enabled the rapid growth of thermal imaging applications. These detectors are predominantly bolometers, reading out a pixel’s temperature change due to infrared radiation as a resistance change. Another uncooled sensing method is to transduce the infrared radiation into the frequency shift of a mechanical resonator. We present here highly sensitive resonant infrared sensors, based on thermo-responsive shape memory polymers. By exploiting the phase-change polymer as transduction mechanism, our approach provides 2 orders of magnitude improvement of the temperature coefficient of frequency. Noise equivalent temperature difference of 22 mK in vacuum and 112 mK in air are obtained using f/2 optics. The noise equivalent temperature difference is further improved to 6 mK in vacuum by using high-Q silicon nitride membranes as substrates for the shape memory polymers. This high performance in air eliminates the need for vacuum packaging, paving a path towards flexible non-hermetically sealed infrared sensors.

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“…7d). These values imply that the designed temperature sensor offers a better resolution than the state-of-the-art resonatorbased temperature sensors [10,21,39]. The frequency noise limits the resolution of the TS resonator, and it is mainly induced by temperature fluctuations and thermomechanical noise.…”

Section: Performance Evaluation: Responsivity (Rv) Hysteresis and Mdtmentioning

confidence: 99%

“…Additionally, our proposed device had a smaller footprint than most of the reported designs. Although some devices [21,39] had a smaller footprint, Cagliani et al's design [39] had a low TCF of only 25 ppm/°C and Zhang et al's design [21] had a low temperature resolution of 0.39 °C with an average TCF of ~550 ppm/°C. Despite the superior performance, our proposed device has the simplest readout circuits among all of these previously reported designs.…”

Section: Performance Evaluation: Responsivity (Rv) Hysteresis and Mdtmentioning

confidence: 99%

High-Sensitivity Thermal Sensing Based on a Single Strain-Assisted Resonator

et al. 2022

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Microresonator-based temperature sensors offer stable and high-resolution temperature detection. However, typical temperaturesensing techniques based on resonators suffer from design complexity and low sensitivity. In this study, we present a simple high-sensitivity temperature sensor that comprises a sealed electrostatically actuated clamped-clamped silicon microbeam resonator. The sensor's high sensitivity is attributed to the thermal-strain effects due to the mismatch between the thermal expansion coefficients of the composite materials. And the sensitivity is further enhanced by operating the resonator near the buckling zone via in situ Joule heating. In addition, The sensor operates at a single drive frequency that corresponds to the resonant frequency at the maximum temperature. A change in temperature induces a thermal strain that shifts the resonant frequency, which changes the output voltage. This considerably simplifies the readout system from the typical frequency-tracking method to the proposed amplitude tracking method. The encapsulated sensor achieves a minimum detectable temperature of 0.0196 °Ϲ and an absolute temperature coefficient of frequency of 1757 ppm/°Ϲ. These results demonstrate the great potential of the proposed sensor for efficient resonant thermal sensing with high resolution, enhanced sensitivity and a simplified readout scheme.

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Ultrasensitive thermometer for atmospheric pressure operation based on a micromechanical resonator

Cited by 7 publications

References 32 publications

Extending the Lifetime of Resonant Atmospheric Particulate Mass Sensors With Solvent Rinses

Extending the Lifetime of Resonant Atmospheric Particulate Mass Sensors With Solvent Rinses

Shape memory polymer resonators as highly sensitive uncooled infrared detectors

High-Sensitivity Thermal Sensing Based on a Single Strain-Assisted Resonator

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