Micro-Nanomechatronics and Human Science, 2004 and the Fourth Symposium Micro-Nanomechatronics for Information-Based Society, 2
DOI: 10.1109/mhs.2004.1421290
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Ultraprecision micromachining of brittle materials by applying ultrasonic elliptical vibration cutting

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Cited by 37 publications
(23 citation statements)
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“…[26,109] who found that the critical depth of cut, the machining accuracy and the tool wear could be significantly improved by applying the vibration on cutting tool. Figure 9 shows the finished micro-groove surface and cutting edge profiles under a critical depth of cut at which the tool radius and feed rate were 2 lm and 150 mm/min, respectively.…”
Section: Amorphous Materialsmentioning
confidence: 99%
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“…[26,109] who found that the critical depth of cut, the machining accuracy and the tool wear could be significantly improved by applying the vibration on cutting tool. Figure 9 shows the finished micro-groove surface and cutting edge profiles under a critical depth of cut at which the tool radius and feed rate were 2 lm and 150 mm/min, respectively.…”
Section: Amorphous Materialsmentioning
confidence: 99%
“…Thus the machining characteristics, such as critical depth of cut, fluctuation of cutting forces, mechanics of chip formation, specific energy, etc., strongly depend on the crystal orientations and cutting directions [116]. Suzuki et al [109] carried out the EVA cutting of single crystal calcium fluoride along different crystal orientations. They found that smooth mirror surfaces without fractures could be obtained easily at a practically large depth of cut by the EVA cutting, especially in the ½121 direction.…”
Section: Single Crystal Materialsmentioning
confidence: 99%
“…Therefore, the machining efficiency is relatively low and the machined surface quality could not attain a stable status due to the other factors in cutting process. To improve the machinability of brittle materials, many assistant methods, such as the ultrasonic elliptical vibration assistant [207], laser beam assistant [208][209][210] and surface modification methods [211][212][213], have been proposed. Ultrasonic vibration-assisted cutting which is an effective method in diamond cutting of ferrous metals [214][215][216] was also a method in improving the machinability of brittle materials [207].…”
Section: Influence Of Brittle Materialsmentioning
confidence: 99%
“…Suzuki and coworkers [12] cut a specially developed tungsten alloy with SCD tools in the ultraprecision UEVC method. Suzuki et al 's research [13] carried out some ultraprecision microgrooving experiments on sintered WC using SCD tools to study the basic effects of UEVC on the ductile micromachining process. In Li and Zhang's studies [14], they obtained surface roughness of 0.08 m on an aluminium alloy using PCD tools in the ultraprecision UEVC cutting experiments.…”
Section: Introductionmentioning
confidence: 99%